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Structural and magnetic properties of Mn-implanted Si

Shengqiang Zhou·K. Potzger·Gufei Zhang·A. Muecklich·F. Eichhorn·N. Schell·R. Groetzschel·B. Schmidt·W. Skorupa·M. Helm·J. Fassbender·D. Geiger
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Abstract

Structural and ferromagnetic properties in Mn implanted, p-type Si were investigated. High resolution structural analysis techniques like synchrotron X-ray diffraction revealed the formation of MnSi1.7 nanoparticles already in the as implanted samples. Depending on the Mn-fluence, the size increases from 5 nm to 20 nm upon rapid thermal annealing. No significant evidence is found for Mn substituting Si sites either in the as-implanted or annealed samples. The observed ferromagnetism yields a saturation moment of 0.21 mu_B per implanted Mn at 10 K, which could be assigned to MnSi1.7 nanoparticles as revealed by a temperature dependent magnetization measurement.

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Shengqiang Zhou, K. Potzger, Gufei Zhang, A. Muecklich, F. Eichhorn, N. Schell, R. Groetzschel, B. Schmidt, W. Skorupa, M. Helm, J. Fassbender, D. Geiger. 2006-12-24. Structural and magnetic properties of Mn-implanted Si. https://doi.org/10.1103/physrevb.75.085203

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