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Phase Analysis of Thin Film Oxide Systems by AES and EELS

V. G. Beshenkov·V. A. Marchenko·V. T. Volkov·A. G. Znamenskii
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Abstract

Auger electron spectroscopy (AES) and electron energy loss spectroscopy (EELS) in a reflection mode are compared as the methods for phase composition investigation of thin film oxide systems by ion profiling. As an example, the Al/Al2O3/Si and YBa2Cu3O7/CeO2/Al2O3 systems are considered. The adaptation of applied statistics methods for AES and EELS data treatment is discussed.

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V. G. Beshenkov, V. A. Marchenko, V. T. Volkov, A. G. Znamenskii. 1998-12-29. Phase Analysis of Thin Film Oxide Systems by AES and EELS. https://arxiv.org/abs/cond-mat/9812411

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