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New combined PIC-MCC approach for fast simulation of a radio frequency discharge at low gas pressure

I. V. Schweigert·V. A. Schweigert
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Abstract

A new combined PIC-MCC approach is developed for accurate and fast simulation of a radio frequency discharge at low gas pressure and high density of plasma. Test calculations of transition between different modes of electron heating in a ccrf discharge in helium and argon show a good agreement with experimental data. We demonstrate high efficiency of the combined PIC-MCC algorithm, especially for the collisionless regime of electron heating.

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I. V. Schweigert, V. A. Schweigert. 2003-08-20. New combined PIC-MCC approach for fast simulation of a radio frequency discharge at low gas pressure. https://doi.org/10.1088/0963-0252%2F13%2F2%2F018

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