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On the applicability of Sato's equation to capacitative radio frequency sheaths

J. Balakrishnan·G. R. Nagabhushana
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Abstract

We show that the time dependent version of Sato's equation, when applied to capacitative rf sheaths is no longer independent of the electric field of the space charge, and discuss the use of the equation for a specific sheath model.

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J. Balakrishnan, G. R. Nagabhushana. 2003-10-08. On the applicability of Sato's equation to capacitative radio frequency sheaths. https://doi.org/10.1088/0022-3727/33/24/101

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