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An optical fiber-taper probe for wafer-scale microphotonic device characterization

C. P. Michael·M. Borselli·T. J. Johnson·C. Chrystal·O. Painter
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Abstract

A small depression is created in a straight optical fiber taper to form a local probe suitable for studying closely spaced, planar microphotonic devices. The tension of the "dimpled" taper controls the probe-sample interaction length and the level of noise present during coupling measurements. Practical demonstrations with high-Q silicon microcavities include testing a dense array of undercut microdisks (maximum Q = 3.3x10^6) and a planar microring (Q = 4.8x10^6).

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C. P. Michael, M. Borselli, T. J. Johnson, C. Chrystal, O. Painter. 2007-02-09. An optical fiber-taper probe for wafer-scale microphotonic device characterization. https://doi.org/10.1364/oe.15.004745

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