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Austin J. Minnich

Publications and source records attributed to Austin J. Minnich.

At least 19 recordsLinked to original sources

On the $\mathrm{In_{x}Ga_{1-x}As}$ channel noise in InP HEMTs from 4 K to 300 K

The InP high-electron-mobility transistor (HEMT) is indispensable for low-noise amplifiers (LNAs) in radio astronomy and quantum computing. The composition of the $\mathrm{In_{x}Ga_{1-x}As}$ channel in InP HEMT is known to influence the LNA noise performance. However, the various physical mechanisms responsible for noise generation are not fully characterized and understood. Here, we investigate the $\mathrm{In_{x}Ga_{1-x}As}$ channel noise from 4 K to 300 K for 100-nm gate-length InP HEMTs with channel indium content of 53\%, 60\% and 70\%. Channel noise was quantified by extracting the equivalent drain noise temperature $\mathit{T}_{d}$ using both on-wafer and LNA-based measurements, covering 40-300 K and 4-40 K, respectively. The 60\% indium channel InP HEMT exhibited the lowest channel noise across the full temperature range. The $\mathit{T}_{d}$ extracted from on-wafer characterization was found to obey a parabolic temperature dependence which predicted the $\mathit{T}_{d}$ at 4 K for all InP HEMTs in good agreement with LNA-based measurements. By expressing the channel noise as the sum of one thermal and one excess noise term, it was found that the former increased linearly with ambient temperature and dominated at 300 K. The channel noise at 4 K was determined by the excess noise term and exhibited a non-monotonic dependence on the channel indium content in the InP HEMT. The results suggest that the excess noise in the InP HEMT originates not only from temperature-independent shot noise but also from impact ionization and real-space transfer noise.

cond-mat.mes-hall

Characterization of ultrathin nickel films deposited by thermal laser evaporation

Thermal laser evaporation is a physical vapor deposition technique of increasing interest because of its ability to evaporate essentially any solid element, even the most refractory such as W. However, many films deposited by this method, especially non-epitaxial films, remain to be characterized; further, key system components such as the laser delivery system have not been described in detail. Here, we present the evaporation and characterization of ultrathin Ni films deposited with a home-built thermal laser evaporation system. The system employs a continuous-wave 1 kW fiber laser (1070 nm) focused to sub-millimeter diameter onto a Ni target rod mounted inside an ultrahigh-vacuum chamber. The laser heats the target to a temperature high enough to produce vapor for film deposition; for Ni, this temperature is around the melting point of 1725 K. We report the characterization of the surface roughness, composition, and room-temperature electrical properties of the films along with the design of the major components of our system. This work advances the growing consensus regarding the potential of thermal laser evaporation for thin film deposition and epitaxy and provides the necessary design information to facilitate broader adoption of the technique.

cond-mat.mtrl-sci

Directional atomic layer etching of MgO-doped lithium niobate using Br-based plasma

Lithium niobate (LiNbO$_3$, LN) is a nonlinear optical material of high interest for integrated photonics with applications ranging from optical communications to quantum information processing. The performance of on-chip devices based on thin-film lithium niobate (TFLN) is presently limited by fabrication imperfections such as sidewall surface roughness and geometry inhomogeneities over the chip. Atomic layer etching (ALE) could potentially be used to overcome these difficulties. Although an isotropic ALE process for LN has been reported, performing LN fabrication completely with ALE faces several challenges, including the lack of a directional ALE process for pattern transfer and the redeposition of involatile compounds. Here, we report a directional ALE process for LN consisting of sequential exposures of HBr/BCl$_3$/Ar plasma for surface modification and Ar plasma for removal. The HBr chemistry is found to decrease redeposition compared to F- and Cl-based plasmas, which we attribute to the higher vapor pressures of Br-based products. A grating pattern etched entirely by the process (total etch depth of 220 nm) exhibits no aspect ratio dependent etching (ARDE) down to the smallest tested gap of 150 nm, in contrast to ion milling in which ARDE manifests even at 300 nm gaps for the same etch depth. The HBr plasma chemistry is also found to support an isotropic process consisting of sequential exposures of H$_2$ plasma and HBr/BCl$_3$/Ar plasma. These processes could be used together to perform the complete fabrication process for TFLN devices, eliminating imperfections arising from ion milling.

cond-mat.mtrl-sci

Investigation of Real-Space Transfer Noise in InP Quantum Wells

Indium phosphide (InP) high electron-mobility transistors (HEMTs) are widely used in many fields such as quantum computing because of their unparalleled microwave noise performance. Achieving improved noise performance requires a physical understanding of the noise mechanisms. Here, we experimentally test a theoretical proposal for drain (output) noise as originating in part from real-space transfer (RST) by characterizing the microwave noise temperature of transfer-length method structures with the same channel composition but two different barrier compositions. This choice was made to alter the confining potential of electrons in the channel, thereby affecting the RST mechanism, while avoiding changes to the channel transport properties. We observe trends of noise temperature with physical temperature and source-drain voltage which are compatible with the predictions of RST noise theory. This finding supports the hypothesis that RST contributes to drain noise in HEMTs.

physics.app-ph

Variable-temperature attenuator calibration method for on-wafer microwave noise characterization of low-noise amplifiers

Low-noise cryogenic microwave amplifiers are widely used in applications such as radio astronomy and quantum computing. On-wafer noise characterization of cryogenic low-noise transistors is desirable because it facilitates more rapid characterization of devices prior to packaging, but obtaining accurate noise measurements is difficult due to the uncertainty arising from the input loss and temperature gradients prior to the device-under-test (DUT). Here, we report a calibration method that enables the simultaneous determination of the backend noise temperature and effective-noise-ratio at the input plane of the DUT. The method is based on measuring the S-parameters and noise power of a series of attenuators at two or more distinct physical temperatures. We validate our method by measuring the noise temperature of InP HEMTs in 4-8 GHz. The calibration method can be generalized to measure the microwave noise temperature of any two-port device so long as a series of attenuators can be measured at two or more distinct physical temperatures.

physics.ins-det

Atomic layer etching of InGaAs using sequential exposures of atomic hydrogen and oxygen gas

The high frequency performance and yield of III-V semiconductor devices such as InP HEMTs is negatively impacted by subsurface etch damage and non-uniform etch depth over the wafer. Atomic layer etching (ALE) has the potential to overcome this challenge because of its ability to etch with Angstrom-scale precision, low damage, and intrinsic wafer-scale uniformity. Here, we report an ALE process for InGaAs based on sequential atomic hydrogen and oxygen gas exposures. An etch rate of 0.095 Å/cycle was observed at 350 °C using ex-situ spectroscopic ellipsometry. The sample remains atomically smooth after 200 cycles of ALE. This process could be employed as a gate recess etch step in InP HEMT fabrication to improve microwave performance and yield.

cond-mat.mtrl-sci

Experimental demonstration of scalable cross-entropy benchmarking to detect measurement-induced phase transitions on a superconducting quantum processor

Quantum systems subject to random unitary evolution and measurements at random points in spacetime exhibit entanglement phase transitions which depend on the frequency of these measurements. Past work has experimentally observed entanglement phase transitions on near-term quantum computers, but the characterization approach using entanglement entropy is not scalable due to exponential overhead of quantum state tomography and postselection. Recently, an alternative protocol to detect entanglement phase transitions using linear cross entropy was proposed, attempting to eliminate both bottlenecks. Here, we report demonstrations of this protocol in systems with one-dimensional and all-to-all connectivities on IBM's quantum hardware on up to 22 qubits, a regime which is presently inaccessible if postselection is required. We demonstrate data collapses onto scaling functions with critical exponents in semiquantitative agreement with theory. Our demonstration of the cross entropy benchmark (XEB) protocol paves the way for studies of measurement-induced entanglement phase transitions and associated critical phenomena on larger near-term quantum systems.

quant-ph

Atomic layer etching of niobium nitride using sequential exposures of O$_2$ and H$_2$/SF$_6$ plasmas

Niobium nitride (NbN) is a metallic superconductor that is widely used for superconducting electronics due to its high transition temperature ($T_c$) and kinetic inductance. Processing-induced damage negatively affects the performance of these devices by mechanisms such as microwave surface loss. Atomic layer etching (ALE), with its ability to etch with Angstrom-scale control and low damage, has the potential to address these issues, but no ALE process is known for NbN. Here, we report such a process consisting of sequential exposures of O$_2$ plasma and H$_2$/SF$_6$ plasma. Exposure to O$_2$ plasma rather than O$_2$ gas yields a greater fraction of Nb in the +5 oxidation state, which is then volatilized by NbF$_5$ formation with exposure to an H$_2$/SF$_6$ plasma. The SF$_6$:H$_2$ flow rate ratio is chosen to produce selective etching of Nb$_2$O$_5$ over NbN, enabling self-limiting etching within a cycle. An etch rate of 1.77 Å/cycle was measured at 125 $^\circ$C using ex-situ ellipsometry. The $T_c$ of the ALE-etched film is higher than that of an RIE-etched film of a similar thickness, highlighting the low-damage nature of the process. These findings have relevance for applications of NbN in single-photon detectors and superconducting microresonators.

cond-mat.mtrl-sci

Isotropic atomic layer etching of MgO-doped lithium niobate using sequential exposures of H$_2$ and SF$_6$ plasmas

Lithium niobate (LiNbO$_3$, LN) is a ferroelectric crystal of interest for integrated photonics owing to its large second-order optical nonlinearity and the ability to impart periodic poling via an external electric field. However, on-chip device performance based on thin-film lithium niobate (TFLN) is presently limited by propagation losses arising from surface roughness and corrugations. Atomic layer etching (ALE) could potentially smooth these features and thereby increase photonic performance, but no ALE process has been reported for LN. Here, we report an isotropic ALE process for $x$-cut MgO-doped LN using sequential exposures of H$_2$ and SF$_6$/Ar plasmas. We observe an etch rate of $1.59 \pm 0.02$ nm/cycle with a synergy of $96.9$%. We also demonstrate ALE can be achieved with SF$_6$/O$_2$ or Cl$_2$/BCl$_3$ plasma exposures in place of the SF$_6$/Ar plasma step with synergies of $99.5$% and $91.5$% respectively. The process is found to decrease the sidewall surface roughness of TFLN waveguides etched by physical Ar$^+$ milling by 30% without additional wet processing. Our ALE process could be used to smooth sidewall surfaces of TFLN waveguides as a post-processing treatment, thereby increasing the performance of TFLN nanophotonic devices and enabling new integrated photonic device capabilities.

cond-mat.mes-hall

Valleytronics and negative differential resistance in cubic boron nitride: a first-principles study

Cubic boron nitride (c-BN) is an ultrawide-bandgap semiconductor of significant interest for high-frequency and high-power electronics applications owing to its high saturation drift velocity and high electric breakdown field. Beyond transistors, devices exploiting the valley degree of freedom or negative differential resistance are of keen interest. While diamond has been found to have potential for these applications, c-BN has not been considered owing to a lack of knowledge of the relevant charge transport properties. Here, we report a study of the high-field transport and noise properties of c-BN using first-principles calculations. We find that c-BN exhibits an abrupt region of negative differential resistance (NDR) below 140 K, despite the lack of multi-valley band structure typically associated with NDR. This feature is found to arise from a strong energy dependence of the scattering rates associated with optical phonon emission. The high optical phonon energy also leads to an intervalley scattering time rivaling that of diamond. The negative differential resistance and long intervalley scattering time indicate the potential of c-BN for transferred-electron and valleytronic devices, respectively.

cond-mat.mtrl-sci

Experimental Investigation of Drain Noise in High Electron Mobility Transistors: Thermal and Hot Electron Noise

We report the on-wafer characterization of $S$-parameters and microwave noise temperature ($T_{50}$) of discrete metamorphic InGaAs high electron mobility transistors (mHEMTs) at 40 K and 300 K and over a range of drain-source voltages ($V_{DS}$). From these data, we extract a small-signal model and the drain (output) noise current power spectral density ($S_{id}$) at each bias and temperature. This procedure enables $S_{id}$ to be obtained while accounting for the variation of small-signal model, noise impedance match, and other parameters under the various conditions. We find that the thermal noise associated with the channel conductance can only account for a portion of the measured output noise. Considering the variation of output noise with physical temperature and bias and prior studies of microwave noise in quantum wells, we hypothesize that a hot electron noise source based on real-space transfer of electrons from the channel to the barrier could account for the remaining portion of $S_{id}$. We suggest further studies to gain insights into the physical mechanisms. Finally, we calculate that the minimum HEMT noise temperature could be reduced by up to $\sim 50$% and $\sim 30$% at cryogenic temperature and room temperature, respectively, if the hot electron noise could be suppressed.

cond-mat.mes-hall

Investigation of Cryogenic Current-Voltage Anomalies in SiGe HBTs: Role of Base-Emitter Junction Inhomogeneities

The deviations of cryogenic collector current-voltage characteristics of SiGe heterojunction bipolar transistors (HBTs) from ideal drift-diffusion theory have been a topic of investigation for many years. Recent work indicates that direct tunneling across the base contributes to the non-ideal current in highly-scaled devices. However, cryogenic discrepancies have been observed even in older-generation devices for which direct tunneling is negligible, suggesting another mechanism may also contribute. Although similar non-ideal current-voltage characteristics have been observed in Schottky junctions and were attributed to spatial inhomogeneities in the base-emitter junction potential, this explanation has not been considered for SiGe HBTs. Here, we experimentally investigate this hypothesis by characterizing the collector current ideality factor and built-in potential of a SiGe HBT versus temperature using a cryogenic probe station. The temperature-dependence of the ideality factor and the relation between the built-in potential as measured by capacitance-voltage and current-voltage characteristics are in good qualitative agreement with the predictions of a theory of electrical transport across a junction with a Gaussian distribution of potential barrier heights. These observations suggest that lateral inhomogeneities in the base-emitter junction potential may contribute to the cryogenic non-idealities. This work helps to identify the physical mechanisms limiting the cryogenic microwave noise performance of SiGe HBTs.

physics.ins-det

Hot electron diffusion, microwave noise, and piezoresistivity in Si from first principles

Ab-initio calculations of charge transport properties in materials without adjustable parameters have provided microscopic insights into electron-phonon interactions which govern charge transport properties. Other transport properties such as the diffusion coefficient provide additional microscopic information and are readily accessible experimentally, but few ab-initio calculations of these properties have been performed. Here, we report first-principles calculations of the hot electron diffusion coefficient in Si and its dependence on electric field over temperatures from 77 -- 300 K. While qualitative agreement in trends such as anisotropy at high electric fields is obtained, the quantitative agreement that is routinely achieved for low-field mobility is lacking. We examine whether the discrepancy can be attributed to an inaccurate description of f-type intervalley scattering by computing the microwave-frequency noise spectrum and piezoresistivity. These calculations indicate that any error in the strength of f-type scattering is insufficient to explain the diffusion coefficient discrepancies. Our findings suggest that the measured diffusion coefficient is influenced by factors such as space charge effects which are not included in ab-initio calculations, impacting the interpretation of this property in terms of charge transport processes.

cond-mat.mtrl-sci

Isotropic plasma-thermal atomic layer etching of superconducting TiN films using sequential exposures of molecular oxygen and SF$_6/$H$_2$ plasma

Microwave loss in superconducting titanium nitride (TiN) films is attributed to two-level systems in various interfaces arising in part from oxidation and microfabrication-induced damage. Atomic layer etching (ALE) is an emerging subtractive fabrication method which is capable of etching with Angstrom-scale etch depth control and potentially less damage. However, while ALE processes for TiN have been reported, they either employ HF vapor, incurring practical complications; or the etch rate lacks the desired control. Further, the superconducting characteristics of the etched films have not been characterized. Here, we report an isotropic plasma-thermal TiN ALE process consisting of sequential exposures to molecular oxygen and an SF$_6$/H$_2$ plasma. For certain ratios of SF$_6$:H$_2$ flow rates, we observe selective etching of TiO$_2$ over TiN, enabling self-limiting etching within a cycle. Etch rates were measured to vary from 1.1 Å/cycle at 150 $^\circ$C to 3.2 Å/cycle at 350 $^\circ$C using ex-situ ellipsometry. We demonstrate that the superconducting critical temperature of the etched film does not decrease beyond that expected from the decrease in film thickness, highlighting the low-damage nature of the process. These findings have relevance for applications of TiN in microwave kinetic inductance detectors and superconducting qubits.

cond-mat.mes-hall

Hot hole transport and noise phenomena in silicon at cryogenic temperatures from first principles

The transport properties of hot holes in silicon at cryogenic temperatures exhibit several anomalous features, including the emergence of two distinct saturated drift velocity regimes and a non-monotonic trend of the current noise versus electric field at microwave frequencies. Despite prior investigations, these features lack generally accepted explanations. Here, we examine the microscopic origin of these phenomena by extending a recently developed ab-initio theory of high-field transport and noise in semiconductors. We find that the drift velocity anomaly may be attributed to scattering dominated by acoustic phonon emission, leading to an additional regime of drift velocity saturation at temperatures $\sim 40$ K for which the acoustic phonon occupation is negligible; while the non-monotonic trend in the current noise arises due to the decrease in momentum relaxation time with electric field. The former conclusion is consistent with the findings of prior work, but the latter distinctly differs from previous explanations. This work highlights the use of high-field transport and noise phenomena as sensitive probes of microscopic charge transport phenomena in semiconductors.

cond-mat.mtrl-sci

Charge transport in BAs and the role of two-phonon scattering

The semiconductor BAs has drawn significant interest due to experimental reports of simultaneous high thermal conductivity and ambipolar charge mobility. The \textit{ab~initio} prediction of high electron and hole mobility assumed the dominance of charge carrier scattering by one phonon. Recently, higher-order electron-phonon scattering processes in polar and non-polar semiconductors have been reported to have a non-negligible impact on charge transport properties, suggesting they may play a role in BAs as well. Here, we report an \textit{ab~initio} study of two-phonon electron and hole scattering processes in BAs. We find that inclusion of these higher-order processes reduces the computed room temperature electron and hole mobility in BAs by around 40\% from the one-phonon value, resulting in an underestimate of experimental values by a similar percentage. We suggest an experimental approach to test these predictions using luminescence spectroscopy that is applicable to the defective samples which are presently available.

cond-mat.mtrl-sci

Quantum Computation of Frequency-Domain Molecular Response Properties Using a Three-Qubit iToffoli Gate

The quantum computation of molecular response properties on near-term quantum hardware is a topic of significant interest. While computing time-domain response properties is in principle straightforward due to the natural ability of quantum computers to simulate unitary time evolution, circuit depth limitations restrict the maximum time that can be simulated and hence the extraction of frequency-domain properties. Computing properties directly in the frequency domain is therefore desirable, but the circuits require large depth when the typical hardware gate set consisting of single- and two-qubit gates is used. Here, we report the experimental quantum computation of the response properties of diatomic molecules directly in the frequency domain using a three-qubit iToffoli gate, enabling a reduction in circuit depth by a factor of two. We show that the molecular properties obtained with the iToffoli gate exhibit comparable or better agreement with theory than those obtained with the native CZ gates. Our work is among the first demonstrations of the practical usage of a native multi-qubit gate in quantum simulation, with diverse potential applications to the simulation of quantum many-body systems on near-term digital quantum computers.

quant-ph

Transport and noise of hot electrons in GaAs using a semi-analytical model of two-phonon polar optical phonon scattering

Recent ab-initio studies of electron transport in GaAs have reported that electron-phonon (e-ph) interactions beyond the lowest order play a fundamental role in charge transport and noise phenomena. Inclusion of the next-leading-order process in which an electron scatters with two phonons was found to yield good agreement for the high-field drift velocity, but the characteristic non-monotonic trend of the power spectral density of current fluctuations (PSD) with electric field was not predicted. The high computational cost of the ab-initio approach necessitated various approximations to the two-phonon scattering term, which were suggested as possible origins of the discrepancy. Here, we report a semi-analytical transport model of two-phonon electron scattering via the Fröhlich mechanism, allowing a number of the approximations in the ab-initio treatment to be lifted while retaining the accuracy to within a few percent. We compare the calculated and experimental transport and noise properties as well as scattering rates measured by photoluminescence experiments. We find quantitative agreement within 15% for the drift velocity and 25% for the $Γ$ valley scattering rates, and agreement with the $Γ-L$ intervalley scattering rates within a factor of two. Considering these results and prior studies of current noise in GaAs, we conclude that the most probable origin of the non-monotonic PSD trend versus electric field is the formation of space charge domains rather than intervalley scattering as has been assumed.

cond-mat.mtrl-sci