arXiv subjects

Bretislav Mikel

Publications and source records attributed to Bretislav Mikel.

3 recordsLinked to original sources

arXiv2025

Monolithic interferometric modules for multi-axis coordinate positioning with sub-nanometre precision

We report on developing, characterizing, and verifying a compact, monolithic laser interferometric assembly designed for high-precision two- and three-axis displacement measurements in coordinate positioning systems. The design targets OEM integration into advanced precision motion platforms, including nanometrology instruments, semiconductor manufacturing equipment, and ultra-high vacuum (UHV) environments. Using a single laser source, the assembly integrates multiple interferometers into a monolithic L-shaped base frame, enabling sub-nanometer periodic error in X-Y motion systems while minimizing geometric and thermal instabilities. The pre-aligned and pre-adjusted architecture simplifies integration, enhances long-term stability, and ensures consistent metrological performance. The system's verification protocol employs quadrature phase analysis and systematic error metrics to characterize performance and optimise assembly. The results indicate sub-nanometer measurement capability and suggest the system's suitability for scalable implementation in advanced coordinate metrology applications.

physics.optics↗

arXiv2024

Characterising and tackling thermally induced zero-drift in displacement measuring interferometry using temperature-controlled enclosure

Our research efforts in displacement measurement interferometry focused on long-term drifts initiated an extended experimental investigation in the interferometric assemblies of our design. We aimed to analyze, characterize and tackle the long-term measurement stability, expressed as the zero-drift, with particular attention to the thermal effects. For the experimentation, we developed a thermostatic chamber equipped with active temperature regulation, an array of sensors and control electronics. With either the finely stabilized temperature or with the thermal cycling, we can carry out a range of investigations: verification of modified design or prototype interferometers, testing of production pieces, characterization of integrated assemblies and units in terms of the zero drift and the susceptibility to thermal effects -- the temperature sensitivity ($δL / δT$, expressed in nm.K$^{-1}$). With these experimental studies, we demonstrate the potential of the zero drift studies to contribute to the development and broader expansion of interferometric instrumentation.

physics.ins-det↗

arXiv2019

Linearized and Compensated Interferometric System for High-Velocity Traceable Length Calibration on a Metre Scale

We report on a traceable calibration system for a 3500mm-long console that carries a measurement system for inspecting the diameter of a circular reactor chassis. The system uses two single-pass laser interferometers with homodyne fringe detection for measurement in two degrees of freedom. The hybrid FPGA-microcontroller control module carries out the fringe detection together with the application-specific scale linearization approach and the compensation of environmental influences such as thermal elongation and the refractive index of air fluctuations. We demonstrated the system feasibility with an accuracy of a few microns and translation velocity higher than 0:1 metre per second.

physics.ins-det↗