Linearized and Compensated Interferometric System for High-Velocity Traceable Length Calibration on a Metre Scale

Simon Rerucha; Bretislav Mikel; Zdenek Matej; Ondrej Herman; Miroslava Hola; Michal Jelinek; Petr Jedlicka; Ondrej Cip; Josef Lazar

doi:10.1117/12.2519461

arXiv · 1905.00778

Linearized and Compensated Interferometric System for High-Velocity Traceable Length Calibration on a Metre Scale

Simon Rerucha·Bretislav Mikel·Zdenek Matej·Ondrej Herman·Miroslava Hola·Michal Jelinek·Petr Jedlicka·Ondrej Cip·Josef Lazar

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Abstract

We report on a traceable calibration system for a 3500mm-long console that carries a measurement system for inspecting the diameter of a circular reactor chassis. The system uses two single-pass laser interferometers with homodyne fringe detection for measurement in two degrees of freedom. The hybrid FPGA-microcontroller control module carries out the fringe detection together with the application-specific scale linearization approach and the compensation of environmental influences such as thermal elongation and the refractive index of air fluctuations. We demonstrated the system feasibility with an accuracy of a few microns and translation velocity higher than 0:1 metre per second.

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Simon Rerucha, Bretislav Mikel, Zdenek Matej, Ondrej Herman, Miroslava Hola, Michal Jelinek, Petr Jedlicka, Ondrej Cip, Josef Lazar. 2019-05-02. Linearized and Compensated Interferometric System for High-Velocity Traceable Length Calibration on a Metre Scale. https://doi.org/10.1117/12.2519461

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