arXiv subjects

Felix M. Mayor

Publications and source records attributed to Felix M. Mayor.

16 recordsLinked to original sources

arXiv2025

Robotic chip-scale nanofabrication for superior consistency

Unlike the rigid, high-volume automation found in industry, academic research requires process flexibility that has historically relied on variable manual operations. This hinders the fabrication of advanced, complex devices. We propose to address this gap by automating these low-volume, high-stakes tasks using a robotic arm to improve process control and consistency. As a proof of concept, we deploy this system for the resist development of Josephson junction devices. A statistical comparison of the process repeatability shows the robotic process achieves a resistance spread across chips close to 2%, a significant improvement over the ~7% spread observed from human operators, validating robotics as a solution to eliminate operator-dependent variability and a path towards industrial-level consistency in a research setting.

physics.app-ph↗

arXiv2025

Integrated phononic waveguide on thin-film lithium niobate on diamond

We demonstrate wavelength-scale phononic waveguides formed by transfer-printed thin-film lithium niobate (LN) on bulk diamond (LNOD), a material stack that combines the strong piezoelectricity of LN with the high acoustic velocity and color-center compatibility of diamond. We characterize a delay line based on a 100 micron long phononic waveguide at room and cryogenic temperatures. The total insertion loss through the device at 4 kelvin is -5.8 dB, corresponding to a >50% transducer efficiency, at a frequency of 2.8 gigahertz. Our work represents a step towards phonon-mediated hybrid quantum systems consisting of strain-sensitive color centers in diamond.

cond-mat.mes-hall↗

arXiv2025

Correlated Dephasing in a Piezoelectrically Transduced Silicon Phononic Waveguide

Nanomechanical waveguides offer a multitude of applications in quantum and classical technologies. Here, we design, fabricate, and characterize a compact silicon single-mode phononic waveguide actuated by a thin-film lithium niobate piezoelectric element. Our device directly transduces between microwave frequency photons and phonons propagating in the silicon waveguide, providing a route for coupling to superconducting circuits. We probe the device at millikelvin temperatures through a superconducting microwave resonant matching cavity to reveal harmonics of the silicon waveguide and extract a piezoelectric coupling rate $g/2\pi= 1.1$ megahertz and a mechanical coupling rate $f/2\pi=5$ megahertz. Through time-domain measurements of the silicon mechanical modes, we observe energy relaxation timescales of $T_{1,\text{in}} \approx 500$ microseconds, pure dephasing timescales of $T_\phi \approx {60}$ microseconds and dephasing dynamics that indicate the presence of an underlying frequency noise process with a non-uniform spectral distribution. We measure phase noise cross-correlations between silicon mechanical modes and observe detuning-dependent positively-correlated frequency fluctuations. Our measurements provide valuable insights into the dynamics and decoherence characteristics of hybrid piezoelectric-silicon acoustic devices, and suggest approaches for mitigating and circumventing noise processes for emerging quantum acoustic systems.

cond-mat.mes-hall↗

arXiv2024

A two-dimensional optomechanical crystal for quantum transduction

Integrated optomechanical systems are one of the leading platforms for manipulating, sensing, and distributing quantum information. The temperature increase due to residual optical absorption sets the ultimate limit on performance for these applications. In this work, we demonstrate a two-dimensional optomechanical crystal geometry, named \textbf{b-dagger}, that alleviates this problem through increased thermal anchoring to the surrounding material. Our mechanical mode operates at 7.4 GHz, well within the operation range of standard cryogenic microwave hardware and piezoelectric transducers. The enhanced thermalization combined with the large optomechanical coupling rates, $g_0/2\pi \approx 880~\mathrm{kHz}$, and high optical quality factors, $Q_\text{opt} = 2.4 \times 10^5$, enables the ground-state cooling of the acoustic mode to phononic occupancies as low as $n_\text{m} = 0.35$ from an initial temperature of 3 kelvin, as well as entering the optomechanical strong-coupling regime. Finally, we perform pulsed sideband asymmetry of our devices at a temperature below 10 millikelvin and demonstrate ground-state operation ($n_\text{m} < 0.45$) for repetition rates as high as 3 MHz. Our results extend the boundaries of optomechanical system capabilities and establish a robust foundation for the next generation of microwave-to-optical transducers with entanglement rates overcoming the decoherence rates of state-of-the-art superconducting qubits.

quant-ph↗

arXiv2023

Single-Mode Squeezed Light Generation and Tomography with an Integrated Optical Parametric Oscillator

Quantum optical technologies promise advances in sensing, computing, and communication. A key resource is squeezed light, where quantum noise is redistributed between optical quadratures. We introduce a monolithic, chip-scale platform that exploits the $χ^{(2)}$ nonlinearity of a thin-film lithium niobate (TFLN) resonator device to efficiently generate squeezed states of light. Our system integrates all essential components -- except for the laser and two detectors -- on a single chip with an area of one square centimeter, significantly reducing the size, operational complexity, and power consumption associated with conventional setups. Our work addresses challenges that have limited previous integrated nonlinear photonic implementations that rely on either $χ^{(3)}$ nonlinear resonators or on integrated waveguide $χ^{(2)}$ parametric amplifiers. Using the balanced homodyne measurement subsystem that we implemented on the same chip, we measure a squeezing of 0.55 dB and an anti-squeezing of 1.55 dB. We use 20 mW of input power to generate the parametric oscillator pump field by employing second harmonic generation on the same chip. Our work represents a substantial step toward compact and efficient quantum optical systems posed to leverage the rapid advances in integrated nonlinear and quantum photonics.

quant-ph↗

arXiv2023

Strong dispersive coupling between a mechanical resonator and a fluxonium superconducting qubit

We demonstrate strong dispersive coupling between a fluxonium superconducting qubit and a 690 megahertz mechanical oscillator, extending the reach of circuit quantum acousto-dynamics (cQAD) experiments into a new range of frequencies. We have engineered a qubit-phonon coupling rate of $g\approx2π\times14~\text{MHz}$, and achieved a dispersive interaction that exceeds the decoherence rates of both systems while the qubit and mechanics are highly nonresonant ($Δ/g\gtrsim10$). Leveraging this strong coupling, we perform phonon number-resolved measurements of the mechanical resonator and investigate its dissipation and dephasing properties. Our results demonstrate the potential for fluxonium-based hybrid quantum systems, and a path for developing new quantum sensing and information processing schemes with phonons at frequencies below 700 MHz to significantly expand the toolbox of cQAD.

quant-ph↗

arXiv2023

Flexible Integration of Gigahertz Nanomechanical Resonators with a Superconducting Microwave Resonator using a Bonded Flip-Chip Method

We demonstrate strong coupling of gigahertz-frequency nanomechanical resonators to a frequency-tunable superconducting microwave resonator via a galvanically bonded flip-chip method. By tuning the microwave resonator with an external magnetic field, we observe a series of hybridized microwave-mechanical modes and report coupling strengths of $\sim {15}~\text{MHz}$ at cryogenic temperatures. The demonstrated multi-chip approach provides flexible rapid characterization and simplified fabrication, and could potentially enable coupling between a variety of quantum systems. Our work represents a step towards a plug-and-play architecture for building more complex hybrid quantum systems.

quant-ph↗

arXiv2022

Optically heralded microwave photons

A quantum network that distributes and processes entanglement would enable powerful new computers and sensors. Optical photons with a frequency of a few hundred terahertz are perhaps the only way to distribute quantum information over long distances. Superconducting qubits on the other hand, which are one of the most promising approaches for realizing large-scale quantum machines, operate naturally on microwave photons that have roughly $40,000$ times less energy. To network these quantum machines across appreciable distances, we must bridge this frequency gap and learn how to generate entanglement across widely disparate parts of the electromagnetic spectrum. Here we implement and demonstrate a transducer device that can generate entanglement between optical and microwave photons, and use it to show that by detecting an optical photon we add a single photon to the microwave field. We achieve this by using a gigahertz nanomechanical resonance as an intermediary, and efficiently coupling it to optical and microwave channels through strong optomechanical and piezoelectric interactions. We show continuous operation of the transducer with $5\%$ frequency conversion efficiency, and pulsed microwave photon generation at a heralding rate of $15$ hertz. Optical absorption in the device generates thermal noise of less than two microwave photons. Joint measurements on optical photons from a pair of transducers would realize entanglement generation between distant microwave-frequency quantum nodes. Improvements of the system efficiency and device performance, necessary to realize a high rate of entanglement generation in such networks are within reach.

quant-ph↗

arXiv2022

Platform-agnostic waveguide integration of high-speed photodetectors with evaporated tellurium thin films

Many attractive photonics platforms still lack integrated photodetectors due to inherent material incompatibilities and lack of process scalability, preventing their widespread deployment. Here we address the problem of scalably integrating photodetectors in a photonic platform-independent manner. Using a thermal evaporation and deposition technique developed for nanoelectronics, we show that tellurium (Te), a quasi-2D semi-conductive element, can be evaporated at low temperature directly onto photonic chips to form air-stable, high-responsivity, high-speed, ultrawide-band photodetectors. We demonstrate detection at visible, telecom, and mid-infrared wavelengths, a bandwidth of more than 40 GHz, and platform-independent scalable integration with photonic structures in silicon, silicon nitride and lithium niobate.

physics.optics↗

arXiv2022

High-bandwidth CMOS-voltage-level electro-optic modulation of 780 nm light in thin-film lithium niobate

Integrated photonics operating at visible-near-infrared (VNIR) wavelengths offer scalable platforms for advancing optical systems for addressing atomic clocks, sensors, and quantum computers. The complexity of free-space control optics causes limited addressability of atoms and ions, and this remains an impediment on scalability and cost. Networks of Mach-Zehnder interferometers can overcome challenges in addressing atoms by providing high-bandwidth electro-optic control of multiple output beams. Here, we demonstrate a VNIR Mach-Zehnder interferometer on lithium niobate on sapphire with a CMOS voltage-level compatible full-swing voltage of 4.2 V and an electro-optic bandwidth of 2.7 GHz occupying only 0.35 mm$^2$. Our waveguides exhibit 1.6 dB/cm propagation loss and our microring resonators have intrinsic quality factors of 4.4 $\times$ 10$^5$. This specialized platform for VNIR integrated photonics can open new avenues for addressing large arrays of qubits with high precision and negligible cross-talk.

physics.optics↗

arXiv2020

Acousto-optic modulation of a wavelength-scale waveguide

We demonstrate a collinear acousto-optic modulator in a suspended film of lithium niobate employing a high-confinement, wavelength-scale waveguide. By strongly confining the optical and mechanical waves, this modulator improves by orders of magnitude a figure-of-merit that accounts for both acousto-optic and electro-mechanical efficiency. Our device demonstration marks a significant technological advance in acousto-optics that promises a novel class of compact and low-power frequency shifters, tunable filters, non-magnetic isolators, and beam deflectors.

physics.optics↗

arXiv2020

Gigahertz phononic integrated circuits on thin-film lithium niobate on sapphire

Acoustic devices play an important role in classical information processing. The slower speed and lower losses of mechanical waves enable compact and efficient elements for delaying, filtering, and storing of electric signals at radio and microwave frequencies. Discovering ways of better controlling the propagation of phonons on a chip is an important step towards enabling larger scale phononic circuits and systems. We present a platform, inspired by decades of advances in integrated photonics, that utilizes the strong piezoelectric effect in a thin film of lithium niobate on sapphire to excite guided acoustic waves immune from leakage into the bulk due to the phononic analogue of index-guiding. We demonstrate an efficient transducer matched to 50 ohm and guiding within a 1-micron wide mechanical waveguide as key building blocks of this platform. Putting these components together, we realize acoustic delay lines, racetrack resonators, and meander line waveguides for sensing applications. To evaluate the promise of this platform for emerging quantum technologies, we characterize losses at low temperature and measure quality factors on the order of 50,000 at 4 kelvin. Finally, we demonstrate phononic four-wave mixing in these circuits and measure the nonlinear coefficients to provide estimates of the power needed for relevant parametric processes.

physics.app-ph↗

arXiv2019

Nanobenders: efficient piezoelectric actuators for widely tunable nanophotonics at CMOS-level voltages

Tuning and reconfiguring nanophotonic components is needed to realize systems incorporating many components. The electrostatic force can deform a structure and tune its optical response. Despite the success of electrostatic actuators, they suffer from trade-offs between tuning voltage, tuning range, and on-chip area. Piezoelectric actuation could resolve all these challenges. Standard materials possess piezoelectric coefficients on the order of ${0.01}~\text{nm/V}$, suggesting extremely small on-chip actuation using potentials on the order of one volt. Here we propose and demonstrate compact piezoelectric actuators, called nanobenders, that transduce tens of nanometers per volt. By leveraging the non-uniform electric field from submicron electrodes, we generate bending of a piezoelectric nanobeam. Combined with a sliced photonic crystal cavity to sense displacement, we show tuning of an optical resonance by $\sim 5~\text{nm/V}~({0.6}~\text{THz/V})$ and between $1520$ and $1560~\text{nm}$ ($\sim 400$ linewidths) with only $ {4}~\text{V}$. Finally, we consider other tunable nanophotonic components enabled by nanobenders.

physics.app-ph↗

arXiv2019

Efficient bidirectional piezo-optomechanical transduction between microwave and optical frequency

Efficient interconversion of both classical and quantum information between microwave and optical frequency is an important engineering challenge. The optomechanical approach with gigahertz-frequency mechanical devices has the potential to be extremely efficient due to the large optomechanical response of common materials, and the ability to localize mechanical energy into a micron-scale volume. However, existing demonstrations suffer from some combination of low optical quality factor, low electrical-to-mechanical transduction efficiency, and low optomechanical interaction rate. Here we demonstrate an on-chip piezo-optomechanical transducer that systematically addresses all these challenges to achieve nearly three orders of magnitude improvement in conversion efficiency over previous work. Our modulator demonstrates acousto-optic modulation with $V_π = {0.02}$ V. We show bidirectional conversion efficiency of $10^{-5}$ with ${3.3}$ microwatts red-detuned optical pump, and $5.5\%$ with $323$ microwatts blue-detuned pump. Further study of quantum transduction at millikelvin temperatures is required to understand how the efficiency and added noise are affected by reduced mechanical dissipation, thermal conductivity, and thermal capacity.

quant-ph↗

arXiv2019

Piezoelectric transduction of a wavelength-scale mechanical waveguide

We present a piezoelectric transducer in thin-film lithium niobate that converts a 1.7 GHz microwave signal to a mechanical wave in a single mode of a 1 micron-wide waveguide. We measure a -12 dB conversion efficiency that is limited by material loss. The design method we employ is widely applicable to the transduction of wavelength-scale structures used in emerging phononic circuits like those at the heart of many optomechanical microwave-to-optical quantum converters.

physics.app-ph↗

arXiv2019

Lithium Niobate Piezo-optomechanical Crystals

Demonstrating a device that efficiently connects light, motion, and microwaves is an outstanding challenge in classical and quantum photonics. We make significant progress in this direction by demonstrating a photonic crystal resonator on thin-film lithium niobate (LN) that simultaneously supports high-$Q$ optical and mechanical modes, and where the mechanical modes are coupled piezoelectrically to microwaves. For optomechanical coupling, we leverage the photoelastic effect in LN by optimizing the device parameters to realize coupling rates $g_0/2π\approx 120~\textrm{kHz}$. An optomechanical cooperativity $C>1$ is achieved leading to phonon lasing. Electrodes on the nanoresonator piezoelectrically drive mechanical waves on the beam that are then read out optically allowing direct observation of the phononic bandgap. Quantum coupling efficiency of $η\approx10^{-8}$ from the input microwave port to the localized mechanical resonance is measured. Improvements of the microwave circuit and electrode geometry can increase this efficiency and bring integrated ultra-low-power modulators and quantum microwave-to-optical converters closer to reality.

physics.optics↗