Hybrid Integration of InGaN Lasers in a Foundry-Fabricated Visible-Light Photonics Platform
Visible-spectrum photonic integrated circuits (PICs) present compact and scalable solutions for emerging technologies including quantum computing, biosensing, and virtual/augmented reality. Realizing their full potential requires the development of scalable visible-light-source integration methods compatible with high-volume manufacturing and capable of delivering high optical coupling efficiencies. Here, we demonstrate passive-alignment flip-chip bonding of 450-nm InGaN laser diodes onto a foundry-fabricated visible-light silicon (Si) photonics platform with silicon nitride (SiN) waveguides, thermo-optic (TO) devices, and photodetectors. Hybrid laser integration is realized using a sub-micron-precision die bonder equipped with a vision alignment system and a heatable pickup tool, allowing independent placement of multiple lasers onto a single Si chip. Co-design of the lasers and Si photonics, with lithographically defined alignment marks and mechanical stoppers, enables precise postbonding alignment. Efficient optical coupling between lasers and the SiN waveguides is demonstrated, with a minimum measured coupling loss of 1.1 dB. We achieve a maximum on-chip optical power of 60.7 mW and an on-chip wall-plug efficiency of 7.8%, the highest reported for hybrid-integrated visible-spectrum lasers, to our knowledge. An active PIC is also shown, integrating a bonded laser, an on-chip photodetector for power monitoring, and a thermo-optic switch for optical routing and variable attenuation. Overall, this work highlights passive-alignment flip-chip bonding as a practical, high-performance approach for integrating lasers onto visible-spectrum PICs. We envision that continued refinement of this technique within our photonics platform will support increasingly complex PICs with integrated lasers spanning the visible spectrum.