arXiv subjects

Ivo Utke

Publications and source records attributed to Ivo Utke.

14 recordsLinked to original sources

arXiv2026

Microscale bending plasticity and fracture behavior of amorphous aluminum oxide films

Recent work has demonstrated microscale compressive plasticity in pulse laser deposited (PLD) amorphous alumina (a-Al2O3). This work explores microscale bending plasticity and fracture behavior of a-Al2O3 films deposited using three different methods-PLD, atomic layer deposition (ALD) and sputter deposition (SD). The three deposition routes produced amorphous films with similar stoichiometric compositions. We demonstrate, for the first time, bending plasticity in PLD and ALD a-Al2O3 films at microscale using in situ microcantilever bending experiments at room temperature. All tested PLD a-Al2O3 microcantilevers showed substantial ductile behavior in bending by accommodating total strains >10% without fracture. Half of the tested ALD a-Al2O3 cantilevers exhibited elastic brittle fracture while the other half showed bending plasticity, indicating that the observed deformation behavior is strongly influenced by the presence and distribution of defects within the tested volume. All SD a-Al2O3 microcantilevers showed elastic brittle failure attributed to their columnar growth microstructure. The microscale bending response was found to be highly dependent on the film deposition method highlighting the role of defects in suppressing plasticity mechanisms. Notched microcantilever bending tests on all three films showed brittle failure with similar fracture toughness value of 3.1 +/- 0.2 MPa.m0.5, effectively ruling out any localized crack tip plasticity. These findings underscore the importance of minimizing defects during fabrication in order to develop damage tolerant amorphous oxides. Nonetheless, the observation of bending plasticity in both PLD and ALD microcantilevers, which include a tensile stress component as well, suggests that the plastic deformation mechanisms in amorphous alumina are more general and are not exclusively governed by the deposition method.

cond-mat.mtrl-sci↗

arXiv2025

Ligand co-deposition in focused electron beam induced nanoprinting: a predictive composition model

Recent advances in nanotechnology have created the need to manufacture three-dimensional nanostructures with controlled material composition. Focused Electron Beam Induced Deposition (FEBID) is a nanoprinting technique offering highest spatial resolution combined with the ability to directly 3D-print almost any shape. It relies on local electron-induced dissociation of metal-ligand organometallic molecules adsorbed onto a substrate. So far FEBID continuum modelling involved the surface kinetics of precursor molecules during electron irradiation and succeeded in the prediction of nanoprint shape and growth rate and forms nowadays the basis of software for 3D nano-printing of nanostructures. Here, we expand the model to the surface kinetics of detached ligands. Involving their dissociation and desorption behavior allows to predict trends in the metallic composition of the nanoprinted material and to define desirable nanoprint process windows as function of electron exposure time and flux. We present the theoretical foundations of the model, validate it experimentally for chromium and silver precursors, compare calculated values with literature data for various precursors, and discuss its potential to design new experiments. This contribution enhances our understanding of FEBID dynamics and provides a versatile framework for predictive FEBID material nano-printing.

cond-mat.mes-hall↗

arXiv2024

Bridging classical and quantum interpretation of chemical state analysis by XPS/HAXPES to resolve short-range order in amorphous alumina films

Probing the local structure and chemistry of wide-bandgap amorphous oxide thin films remains challenging due to the limitations of lab-based spectroscopy. This work integrates X-ray photoelectron spectroscopy (XPS), hard X-ray photoemission spectroscopy (HAXPES), molecular dynamics simulations using machine-learning interatomic potentials, density-functional theory (DFT) calculations, and classical electrostatic modeling of final-state core-ionization effects in Al atoms to uncover the structure and chemistry of amorphous alumina polymorphs made with atomic layer deposition (ALD). DFT calculations using the Delta Kohn-Sham method supported the interpretation of final-state effects and validated electrostatic model assumptions. Shifts in the measured Auger parameter were interpreted as extra-atomic relaxation energies, revealing sensitivity to the local coordination environment. Structural disorder and thermal fluctuations were found to govern the distribution of extra-atomic relaxation energies, suggesting that cryo-XPS can isolate and reveal intrinsic structural building blocks of amorphous oxides. Simulated heating and annealing demonstrated that Auger parameter shifts can serve as indicators of phase decomposition in H-supersaturated ALD amorphous alumina. These findings provide a pathway for comprehensive interpretation and predictive modeling of XPS spectra in amorphous wide-bandgap oxides.

cond-mat.mtrl-sci↗

arXiv2024

Double helical plasmonic antennas

Plasmonic double helical antennas are a means to funnel circularly polarized light down to the nanoscale. Here, an existing design tool for single helices is extended to the case of double helices and used to design antennas that combine large chiroptical interaction strength with highly directional light emission. Full-field numerical modeling underpins the design and provides additional insight into surface charge distributions and resonance widths. The helical antennas are fabricated by direct writing with a focused electron beam, a technique that is unrivaled in terms of spatial resolution and 3D shape fidelity. After the printing process, the structures are purified using ozone plasma at room temperature, resulting in the smallest continuous double helix antennas ever realized in gold. Fabricated antennas are studied regarding their polarization-dependent transmission behavior, which shows a large and broadband dissymmetry factor in the visible range. Since the polarization of light is an important tool for implementing logic functionality in photonic and quantum photonic devices, these helices are potential building blocks for future nanophotonic circuits, but also for chiral metamaterials or phase plates.

physics.optics↗

arXiv2024

Direct electron beam writing of silver using a $\beta$-diketonate precursor: first insights

Direct electron beam writing is a powerful tool for fabricating complex nanostructures in a single step. The electron beam locally cleaves the molecules of an adsorbed gaseous precursor to form a deposit, similar to 3D printing but without the need for a resist or development step. Here, we employ for the first time a silver $\beta$-diketonate precursor for focused electron beam induced deposition (FEBID). The used compound (hfac)AgPMe$_3$ operates at an evaporation temperature of 70 - 80{\deg}C and is compatible with commercially available gas injection systems used in any standard scanning electron microscope. Growth of smooth 3D geometries could be demonstrated for tightly focused electron beams, albeit with low silver contents in the deposit volume. The electron beam induced deposition proved sensitive to the irradiation conditions leading to varying compositions of the deposit and internal inhomogeneities such as the formation of a layered structure consisting of a pure silver layer at the interface to the substrate covered by a deposit layer with low silver content. Imaging after the deposition process revealed morphological changes such as the growth of silver particles on the surface. While these effects complicate the application for 3D printing, the unique deposit structure with a thin, compact silver film beneath the deposit body is interesting from a fundamental point of view and may offer additional opportunities for applications.

cond-mat.mtrl-sci↗

arXiv2023

Area Selective Chemical Vapor Deposition of Gold by Electron Beam Seeding

Chemical vapour deposition (CVD) is an established method for producing high-purity thin films, but it typically necessitates the pre- and post-processing of a mask to produce structures. This paper presents a novel maskless patterning technique that enables area selective CVD of gold. A focused electron beam is used to decompose the metal-organic precursor Au(acac)Me$_2$ locally, thereby creating an autocatalytically active seed layer for subsequent CVD with the same precursor. The procedure can be included in the same CVD cycle without the need for clean room lithographic processing. Moreover, it operates at low temperatures of 80 {\deg}C, over 200 K lower than standard CVD temperatures for this precursor, reducing thermal load on the specimen. Given that electron beam seeding operates on any even moderately conductive surface, the process does not constrain device design. This is demonstrated by the example of vertical nanostructures with high aspect ratios of around 40:1 and more. Written using a focused electron beam and the same precursor, these nanopillars exhibit catalytically active nuclei on their surface. Furthermore, they allow for the first time the precise determination of the local temperature increase caused by the writing of nanostructures with an electron beam.

cond-mat.mtrl-sci↗

arXiv2023

Roadmap for focused ion beam technologies

The focused ion beam (FIB) is a powerful tool for the fabrication, modification and characterization of materials down to the nanoscale. Starting with the gallium FIB, which was originally intended for photomask repair in the semiconductor industry, there are now many different types of FIB that are commercially available. These instruments use a range of ion species and are applied broadly in materials science, physics, chemistry, biology, medicine, and even archaeology. The goal of this roadmap is to provide an overview of FIB instrumentation, theory, techniques and applications. By viewing FIB developments through the lens of the various research communities, we aim to identify future pathways for ion source and instrumentation development as well as emerging applications, and the scope for improved understanding of the complex interplay of ion-solid interactions. We intend to provide a guide for all scientists in the field that identifies common research interests and will support future fruitful interactions connecting tool development, experiment and theory. While a comprehensive overview of the field is sought, it is not possible to cover all research related to FIB technologies in detail. We give examples of specific projects within the broader context, referencing original works and previous review articles throughout.

physics.ins-det↗

arXiv2020

Solving the inverse Knudsen problem: gas diffusion in random fibrous media

About a century ago, Knudsen derived the groundbreaking theory of gas diffusion through straight pipes and holes, which since then found widespread application in innumerable fields of science and inspired the development of vacuum and related coating technologies, from academic research to numerous industrial sectors. Knudsen's theory can be straightforwardly applied to filter membranes with arrays of extended holes for example, however, for the inverse geometry arrangement, which arises when solid nanowires or fibers are arranged into porous interwoven material (like in carpets or brushes) the derivation of an analytical theory framework was still missing. In this paper, we have identified the specific geometric and thermodynamic parameters that determine the gas diffusion kinetics in arrays of randomly oriented cylinders and provide a set of analytical expressions allowing to comprehensively describe the gas transport in such structures. We confirmed analytical solutions by Monte Carlo simulations. We specify our findings for an atomic layer deposition process, the diffusion of trimethyaluminium molecules into a carbon nanotube array, but highlight the applicability of our derivation for other fields comprising gas diffusion membranes, composite materials, fuel cells and more.

physics.app-ph↗

arXiv2019

Metals by micro-scale additive manufacturing: comparison of microstructure and mechanical properties

Many emerging applications in microscale engineering rely on the fabrication of three-dimensional architectures in inorganic materials. Small-scale additive manufacturing (AM) aspires to provide flexible and facile access to these geometries. Yet, the synthesis of device-grade inorganic materials is still a key challenge towards the implementation of AM in microfabrication. Here, we present a comprehensive overview of the microstructural and mechanical properties of metals fabricated by most state-of-the-art AM methods that offer a spatial resolution $\leq$10$μ$m. Standardized sets of samples were studied by cross-sectional electron microscopy, nanoindentation and microcompression. We show that current microscale AM techniques synthesize metals with a wide range of microstructures and elastic and plastic properties, including materials of dense and crystalline microstructure with excellent mechanical properties that compare well to those of thin-film nanocrystalline materials. The large variation in materials performance can be related to the individual microstructure, which in turn is coupled to the various physico-chemical principles exploited by the different printing methods. The study provides practical guidelines for users of small-scale additive methods and establishes a baseline for the future optimization of the properties of printed metallic objects $-$ a significant step towards the potential establishment of AM techniques in microfabrication.

cond-mat.mtrl-sci↗

arXiv2012

Urchin-inspired zinc oxide as building blocks for nanostructured solar cells

High surface area nanowire based architectures have been identified as important components for future optoelectronic nanodevices, solar cells, wettability coatings, gas sensors, and biofuel cells. Here we report on a novel urchin-inspired nanowire architecture: its interwoven three-dimensional, high-surface-area nanowire arrangement can be precisely controlled by using a low-cost and scalable synthesis based on a combination of nanosphere lithography, low-temperature atomic layer deposition, and electrodeposition. The performance of single-layer arrays of urchin-inspired ZnO nanowire building blocks competes to that of planar nanowire carpets. We illustrate this capability by fabricating fully-inorganic extremely thin absorber solar cells using CdSe as absorber and CuSCN as hole-collector material. The light diffusion of the urchin-inspired nanowire arrays was varied from 15% to 35%. Homogenous absorption in the wavelength range of 400-800 nm of up to 90% was obtained. Solar conversion efficiencies of ~ 1.33% were achieved.

cond-mat.mtrl-sci↗

arXiv2010

Variation of the metallic content of Focused Electron Beam Induced Deposition of Cobalt

Cobalt-containing deposits from Cobalt carbonyl are experimentally produced and their composition is measured. The Cobalt concentration is found to be readily tunable between 20 and 70 at.% by variation of the dwell time. The variations in metallic concentration are explained by co-deposition of hydrocarbons present in the chamber background pressure.

cond-mat.mtrl-sci↗

arXiv2009

Nano-Hall sensors with granular Co-C

We analyzed the performance of Hall sensors with different Co-C ratios, deposited directly in nano-structured form, using $Co_2(CO)_8$ gas molecules, by focused electron or ion beam induced deposition. Due to the enhanced inter-grain scattering in these granular wires, the Extraordinary Hall Effect can be increased by two orders of magnitude with respect to pure Co, up to a current sensitivity of $1 Ω/T$. We show that the best magnetic field resolution at room temperature is obtained for Co ratios between 60% and 70% and is better than $1 μT/Hz^{1/2}$. For an active area of the sensor of $200 \times 200 nm^2$, the room temperature magnetic flux resolution is $ϕ_{min} = 2\times10^{-5}ϕ_0$, in the thermal noise frequency range, i.e. above 100 kHz.

cond-mat.mtrl-sci↗

arXiv2009

Dose and energy dependence of mechanical properties of focused electron beam induced pillar deposits from Cu(C5HF6O2)2

Bending and vibration tests performed inside the scanning electron microscope were used to mechanically characterize high-aspect pillars grown by focused electron-beam (FEB) induced deposition from the precursor Cu(C5HF6O2)2. Supported by finite element (FE) analysis the Young's modulus was determined from load-deflection measurements using cantilever-based force sensing and the material density from additional resonance vibration analysis. The pillar material consisted of a carbonaceous (C, O, F, H containing) matrix which embeds 5...10 at. % Cu deposited at 5 keV and 20 keV primary electron energy and 100 pA beam current, depending on primary electron energy. Young's moduli of the FEB deposits increased from 17+/-6 GPa to 25+/-8 GPa with increasing electron dose. The density of the carbonaceous matrix shows a dependence on the primary electron energy: 1.2+/-0.3 g cm-3 (5 keV) and 2.2+/-0.5 g cm-3 (20 keV). At a given primary energy a correlation with the irradiation dose is found. Quality factors determined from the phase relation at resonance of the fundamental pillar vibration mode were in the range of 150 to 600 and correlated to the deposited irradiation energy.

cond-mat.mtrl-sci↗

arXiv2007

Resolution in Focused Electron- and Ion-Beam Induced Chemical Vapor Deposition

The key physical processes governing resolution of focused electron-beam and ion-beam-assisted chemical vapor deposition are analyzed via an adsorption rate model. We quantify for the first time how the balance of molecule depletion and replenishment determines the resolution inside the locally irradiated area. Scaling laws are derived relating the resolution of the deposits to molecule dissociation, surface diffusion, adsorption, and desorption. Supporting results from deposition experiments with a copper metalorganic precursor gas on a silicon substrate are presented and discussed.

cond-mat.other↗