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arXiv · 1002.2156

Variation of the metallic content of Focused Electron Beam Induced Deposition of Cobalt

Laurent Bernau·Mihai Gabureac·Ivo Utke
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Abstract

Cobalt-containing deposits from Cobalt carbonyl are experimentally produced and their composition is measured. The Cobalt concentration is found to be readily tunable between 20 and 70 at.% by variation of the dwell time. The variations in metallic concentration are explained by co-deposition of hydrocarbons present in the chamber background pressure.

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Laurent Bernau, Mihai Gabureac, Ivo Utke. 2010-02-10. Variation of the metallic content of Focused Electron Beam Induced Deposition of Cobalt. https://doi.org/10.1002/anie.201004220

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