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Raphael St-Gelais

Publications and source records attributed to Raphael St-Gelais.

At least 19 recordsLinked to original sources

Detectivity and bandwidth limits of cooled and uncooled light detection using nanomechanical resonators

Nanomechanical resonators (NMRs) offer a promising alternative to traditional thermal-based radiation detectors due to their immunity to electrical noise. In recent years, these sensors have reached the previously unattained theoretical detectivity limit set by the fluctuation noise of thermal photons at room temperature. Beyond this point, improvements of NMR resonators do not translate into greater detectivity, but in greater effective bandwidth. There is, however, no simple model predicting the limits of this bandwidth enhancement. Likewise, models predicting the performances of NMR-based radiation sensors under active cooling have not been derived. To address these gaps in knowledge, a key missing ingredient consists of defining the NMR optimal driven amplitude that minimizes additive frequency noise, but without performance degradation from nonlinear phenomena. We find that, in the context of NMR-based radiation sensing, this optimal amplitude ($a_\mathrm{opt}$) is dramatically different than the commonly assumed critical amplitude ($a_\mathrm{c}$) that defines the onset of non-linear phenomena in nanomechanical resonators. Our proposed model for this optimal amplitude allows us to quantify the maximum bandwidth enhancement in NMR-based radiation sensors. We also derive simple equations predicting the maximum detectivity in cryogenically cooled sensors. Finally, combining these two models allows us to define new universal performance limits. This unveils important general conclusions on the ideal geometry of NMR radiation sensors. We find that thermomechanically-limited sensors should be as thin and extended as possible. In contrast, readout-limited sensors should also be thin, but should be just large enough to make radiation heat transfer dominant compared to conduction.

physics.ins-det

Calibration of Microscope-coupled Fourier Transform Infrared Spectrometers for CW and Modulated Light Emission Measurements

Measurement of low power infrared light emission spectra from microstructures can be challenging, but is of key importance in several research fields. Fourier transform infrared spectrometers (FTIR) can be used for characterizing such weak light emitters, but this requires additional custom user calibration compared to traditional FTIR measurements of, e.g., transmission or reflection. These calibration techniques are well documented for standalone FTIR instruments but not for microscope coupled-FTIRs, even though such an architecture greatly simplifies collection of light from micro and nano scale structures. We propose and demonstrate a calibration method for microsope-FTIRs based on the well-known emissivity of doped silicon at high temperature. With this method, we measure responsivity and noise floor of a recently installed microscope-FTIR instrument (Bruker\textsuperscript{\textcopyright} Invenio\textsuperscript{\textregistered} R coupled with a Hyperion II microscope), which is found to be within theoretically predicted values. The method is demonstrated for two different detectors (Mercury Cadmium Telluride and Indium Antimonide), in both continuous wave (CW) and modulated (step-scan) emission measurements mode.

physics.optics

Laser micromachining of arbitrarily complex and overhang-free SiN nanomechanical resonators

Research on silicon nitride (SiN) nanomechanical resonators produces an exceptionally rich variety of resonator geometries, for which there is currently no available rapid prototyping solution. Experimental advances in nanobeam, trampoline, phononic bandgap, and soft-clamping structures all rely on conventional nanofabrication involving e-beam or photolithography, followed by various etching steps. These techniques are typically time-consuming, relatively inflexible, and often result in spurious residual SiN overhang that can degrade mechanical quality factors. In contrast, recent work has shown that simple resonant structures, such as nanobeams, can be prototyped by direct laser ablation of free-standing SiN membranes using a spatially distributed sequence of microholes that limits stress concentration. However, these early demonstrations were restricted to basic shapes, created by manually combining ablation routines for circles and straight lines. Here, we demonstrate the fabrication of arbitrarily complex geometries using an open-source software toolset--released with this publication--that automatically generates laser-ablated hole sequences directly from standard semiconductor layout files (i.e., GDSII). The software includes a layout alignment tool that compensates for the membrane orientation and dimensional variations, limiting material overhang to ~2 um. Using this toolset, we fabricate several resonator geometries, each in under 1 hour, two of which are exhaustively characterized as candidate structures for high-performance radiation sensing. The measured quality factors of these structures closely match finite element simulations and reach values up to 3.7 x 10^6. From these measurements, we extract material quality factors above 3700, which is on par with low-stress SiN unablated plain membranes and with comparable structures produced using conventional fabrication methods.

physics.optics

Enhanced bandwidth in radiation sensors operating at the fundamental temperature fluctuation noise limit

Temperature-based radiation detectors are an essential tool for long optical wavelengths detection even if they often suffer from important bandwidth limitations. Their responsivity, and hence their noise equivalent power (NEP), typically degrade at frequencies exceeding the cutoff set by their characteristic thermal response time ($τ_\text{th}$), i.e., at $ω> τ_\text{th}^{-1}$. Here we show that this bandwidth limitation can be broken when a radiation sensor operates at its fundamental temperature fluctuation noise limit. The key enabler of this demonstration is a nanomechanical sensor in which frequency stability is limited by fundamental temperature fluctuations over an unprecedentedly large bandwidth of 54 $\text{Hz}$. In this range, the sensor performance remains within a factor 3 from its peak detectivity ($D_T^* = 7.4 \times 10^9~\mathrm{cm \cdot Hz^{1/2} W^{-1}}$) even though the thermal cutoff frequency is 30 times lower (i.e., $1/2\mathrmπ τ_\text{th} = 1.8~\text{Hz}$). We also derive and validate experimentally closed-form expression predicting maximum bandwidth enhancement in the context of nanomechanical resonators interfaced with a closed-loop frequency tracking scheme.

physics.optics

Radiator Tailoring for Enhanced Performance in InAs-Based Near-Field Thermophotovoltaics

Near-field thermophotovoltaics (NFTPV) systems have significant potential for waste heat recovery applications, with both high theoretical efficiency and power density, up to 40% and $11 \ \mathrm{W/cm^{2}}$ at 900 K. Yet experimental demonstrations have only achieved up to 14% efficiency and modest power densities (i.e., $0.75 \ \mathrm{W/cm^{2}}$). While experiments have recently started to focus on photovoltaic (PV) cells custom-made for NFTPV, most work still relies on conventional doped silicon radiators. In this work, we design an optimized NFTPV radiator for an indium arsenide-based system and, in the process, investigate models for the permittivity of InAs in the context of NFTPV. Based on existing measurements of InAs absorption, we find that the traditional Drude model overestimates free carrier absorption in InAs. We replace the Drude portion of the InAs dielectric function with a revised model derived from ionized impurity scattering. Using this revised model, we maximize the spectral efficiency and power density of a NFTPV system by optimizing the spectral coupling between a radiator and an InAs PV cell. We find that when the radiator and the PV cell are both made of InAs, a nearly threefold improvement of spectral efficiency is possible compared to a traditional silicon radiator with the same InAs cell. This enhancement reduces subgap thermal transfer while maintaining power output.

physics.app-ph

High detectivity terahertz radiation sensing using frequency-noise-optimized nanomechanical resonators

We achieve high detectivity terahertz sensing using a silicon nitride nanomechanical resonator functionalized with a metasurface absorber. High performances are achieved by striking a fine balance between the frequency stability of the resonator, and its responsivity to absorbed radiation. Using this approach, we demonstrate a detectivity $D^*=3.4\times10^9~\mathrm{cm\cdot\sqrt{Hz}/W}$ and a noise equivalent power $\mathrm{NEP}=36~\mathrm{pW/\sqrt{Hz}}$ that outperform the best room-temperature on-chip THz detectors (i.e., pyroelectrics). Our optical absorber consists of a 1-mm diameter metasurface, which currently enables a 0.5-3 THz detection range but can easily be scaled to other frequencies in the THz and infrared ranges. In addition to demonstrating high-performance terahertz sensing, our work unveils an important fundamental trade-off between high frequency stability and high responsivity in thermal-based nanomechanical radiation sensors.

physics.optics

Long-Term Aging Study of a Silicon Nitride Nanomechanical Resonator

Short-term changes in the resonance frequency of silicon nitride (SiN) nanomechanical resonators can be measured very precisely due to low thermomechanical fluctuations resulting from large mechanical quality factors. These properties enable high-performance detection of quasi-instantaneous stimuli, such as sudden exposure to radiation or adsorption of mass. However, practical use of such sensors will eventually raise questions regarding their less-studied longer-term stability, notably for calibration purposes. We characterize aging of an as-fabricated SiN membrane by continuously tracking changes of its resonance frequency over 135 days in a temperature-controlled high vacuum environment. The aging behavior is consistent with previously reported double-logarithmic and drift-reversal aging trends observed in quartz oscillators. The aging magnitude (300 ppm) is also comparable to typical temperature compensated quartz oscillators (TCXO), after normalization to account for the greater importance of interfaces in our thin (90 nm) resonator, compared to several microns thick TCXOs. Possible causes of aging due to surface adsorption are investigated. We review models on how water adsorption and desorption can cause significant frequency changes, predominantly due to chemisorption stress. Chemical species adsorbed on the resonator surface are also identified by X-ray photoelectron spectroscopy (XPS). These measurements show a significant increase in carbon every time the sample is placed under vacuum, while subsequent exposure to air causes an increase in oxidated carbon. Developing models for the contribution of carbon and oxygen to the membrane stress should therefore be an important future direction. Other contaminants, notably alkaline and halide ions, are detected in smaller quantities and briefly discussed.

cond-mat.mtrl-sci

Vibration Sensitivity of one-port and two-port MEMS microphones

Micro-electro-mechanical system (MEMS) microphones (mics) with two acoustic ports are currently receiving considerable interest, with the promise of achieving higher directional sensitivity compared to traditional one-port architectures. However, measuring pressure differences in two-port microphones typically commands sensing elements that are softer than in one-port mics, and are therefore presumably more prone to interference from external vibration. Here we derive a universal expression for microphone sensitivity to vibration and we experimentally demonstrate its validity for several emerging two-port microphone technologies. We also perform vibration measurements on a one-port mic, thus providing a one-stop direct comparison between one-port and two-port sensing approaches. We find that the acoustically-referred vibration sensitivity of two-port MEMS mics, in units of measured acoustic pressure per external acceleration (i.e., Pascals per g), does not depend on the sensing element stiffness nor on its natural frequency. We also show that this vibration sensitivity in two-port mics is inversely proportional to frequency as opposed to the frequency independent behavior observed in one-port mics. This is confirmed experimentally for several types of microphone packages.

eess.AS

Demonstration of Frequency Stability limited by Thermal Fluctuation Noise in Silicon Nitride Nanomechanical Resonators

The frequency stability of nanomechanical resonators (NMR) dictates the performance level of many state-of-the-art sensors (e.g., mass, force, temperature, radiation) that relate an external physical perturbation to a resonance frequency shift. While this is obviously of fundamental importance, accurate models and understandings of sources of frequency instability are not always available. The contribution of thermomechanical noise to frequency stability has been well studied in recent years and is often the fundamental performance limitation. Frequency stability limited by thermal fluctuation noise has attracted less interest but is nevertheless of fundamental importance notably in temperature sensing applications. In particular, temperature-sensitive NMR have become promising candidates for replacing traditional bolometers in infrared radiation sensing. However, reaching the ultimate detectivity limit of thermal radiation sensors requires their noise to be dominated by fundamental thermal fluctuation, which has not been demonstrated to date. In this work, we first develop a theoretical model for computing the frequency stability of NMR by considering the effect of both additive phase noise (i.e., thermomechanical, and experimental detection noise) and thermal fluctuation noise in a close-loop frequency tracking scheme. We thereafter validate this model experimentally and observe thermal fluctuation noise in SiN drum resonators of various sizes. Our work shows that by using resonators of specific characteristics--such as high temperature sensitivity, high mechanical quality factors, and high mass-to-thermal-conductance ratio--one can minimize additive phase noise below thermal fluctuation noise. This paves the way for NMR-based radiation sensors that can reach the fundamental detectivity limit of thermal radiation sensing and outperform existing technologies.

physics.app-ph

High Q-Factor Silicon Nitride Nanomechanical Resonators Fabricated by Maskless Femtosecond Laser Micro-machining

Freestanding Silicon nitride (SiN) devices are central to the field of nanomechanical resonators and for other technology applications such as transmission electron imaging and nanopore bioassays. The nanofabrication techniques used for fabricating these devices often lack flexibility. While photolithography requires printing of an expensive photomask for each new design iteration, electron-beam lithography is extremely slow and commands high equipment cost. Here we demonstrate maskless rapid prototyping of freestanding SiN nanomechanical resonators fabricated by femtosecond laser ablation of plain SiN membrane in ambient air. We fabricate microbeams with different widths from 7 to 100 um, and we characterize their resonance frequency and mechanical quality (Q) factors. We find that membrane cracking can be avoided during fabrication by carefully engineering the etch pattern, and that laser etching has a negligible effect on built-in tensile stress. For each beam, Q-factors are measured for several eigenmodes and are found to remain high after laser etching. All beams show quality factors greater than 105, while unetched plain membranes have Q > 106. Possible causes for Q-factor reduction are identified, along with future process improvement directions.

physics.optics

Localized Thermal Gradients On-Chip by Radiative Cooling of Silicon Nitride Nanomechanical Resonators

Small scale renewable energy harvesting is an attractive solution to the growing need for power in remote technological applications. For this purpose, localized thermal gradients on-chip--created via radiative cooling--could be exploited to create microscale renewable heat engines running on environmental heat. This could allow self-powering in small scale portable applications, thus reducing the need for non-renewable sources of electricity and hazardous batteries. In this work, we demonstrate the creation of a local thermal gradient on-chip by radiative cooling of a 90 nm thick freestanding silicon nitride nanomechanical resonator integrated on a silicon substrate that remains at ambient temperature. The reduction in temperature of the thin film is inferred by tracking its mechanical resonance frequency, under high vacuum, using an optical fiber interferometer. Experiments were conducted on 15 different days during fall and summer months, resulting in successful radiative cooling of the membrane in each case. Maximum temperature drops of 9.3 K and 7.1 K are demonstrated during the day and night, respectively, in close correspondence with our heat transfer model. Future improvements to the experimental setup could improve the temperature reduction to 48 K for the same membrane, while emissivity engineering potentially yields a maximum theoretical cooling of 67 K with an ideal emitter.

physics.app-ph

Observation of Silicon Nitride Nanomechanical Resonator Actuation Using Capacitive Substrate Excitation

We observe the actuation of silicon nitride (SiN) nanomechanical resonators by electrical excitation of metal-dielectric-semiconductor (MDS) capacitors on their supporting silicon substrate. We develop first-principle models explaining this actuation mechanism by acoustic waves resulting from voltage-dependent electrostatic forces in the MDS capacitors. Models are developed for actuation in the charge accumulation (Ni-pSi) and charge depletion (Al-pSi) regimes. Experimental observations confirm our prediction that charge accumulation (Ni-pSi) is more efficient at actuation than charge depletion. For a 2 V actuation signal, Ni-pSi capacitors achieve 10 nm actuation amplitude in square (1.7 $\times$ 1.7 mm) low-stress (~100 MPa) SiN membrane resonators. In this case, electrical power dissipation in the chip is on the order of 0.1 $μ$W, and spurious heating is less than 1 mK. Both these values could be further reduced by doping the substrate to minimize resistive dissipation. The actuation method is remarkably simple and only requires attachment of wires to the chip with vacuum-compatible nickel paste, with no extra photolithography step. All the chips presented in this work are fabricated in-house, and a detailed fabrication procedure is provided.

physics.app-ph

Heat Transport in Silicon Nitride Drum Resonators and its Influence on Thermal Fluctuation-induced Frequency Noise

Silicon nitride (SiN) drumhead resonators offer a promising platform for thermal sensing due to their high mechanical quality factor and the high temperature sensitivity of their resonance frequency. As such, gaining an understanding of heat transport in SiN resonators as well as their sensing noise limitations is of interest, both of which are goals of the present work. We first present new experimental results on radiative heat transport in SiN membrane, which we use for benchmarking two recently proposed theoretical models. We measure the characteristic thermal response time of square SiN membranes with a thickness of 90 $\pm$ 1.7 nm and side lengths from 1.5 to 12 mm. A clear transition between radiation and conduction dominated heat transport is measured, in close correspondence with theory. In the second portion of this work, we use our experimentally validated heat transport model to provide a closed-form expression for thermal fluctuation-induced frequency noise in SiN membrane resonators. We find that, for large area SiN membranes, thermal fluctuations can be greater than thermomechanical contributions to frequency noise. For the specific case of thermal radiation sensing applications, we also derive the noise equivalent power resulting from thermal fluctuation-induced frequency noise, and we show in which conditions it reduces to the classical detectivity limit of thermal radiation sensors. Our work therefore provides a path towards achieving thermal radiation sensors operating at the never attained fundamental detectivity limit of bolometric sensing. We also identify questions that remain when attempting to push the limits of radiation sensing, in particular, the effect of thermal fluctuation noise in closed-loop frequency tracking schemes remains to be clarified.

physics.app-ph

Radiative Heat Transfer in Free-Standing Silicon Nitride Membranes

Free-standing silicon nitride (SiN) mechanical resonators are of central interests in applications such as temperature and mass sensing, and for fundamental optomechanical reasearch. Understanding thermal coupling between a membrane resonator and its environment is required for predicting thermal noise, frequency noise, as well as sensors responses to temperature changes. In this work, we provide closed-form derivations of intrinsic thermal coupling quantities in free-standing thin films, namely total thermal conductance with the surroundings, thermal response time, and the relative contribution of thermal radiation. Our model is valid for any free-standing thin film anchored on all sides, although we particularly emphasize the specific case of SiN for which spectral emissivity is thoroughly investigated as a function of thickness and temperature. We find that radiative heat exchanges can play a non-negligible role, and even dominate thermal coupling for membranes of sizes commonly employed in optomechanics experiments. We experimentally confirm the validity of our model by measuring radiative thermal coupling between a SiN mechanical resonator and a ceramic heater in high vacuum.

physics.app-ph

High Resolution Measurement of Near-Field Radiative Heat Transfer enabled by Nanomechanical Resonators

Near-field radiative heat transfer (NFHT) research currently suffers from an imbalance between numerous theoretical studies, as opposed to experimental reports that remain, in proportion, relatively scarce. Existing experimental platforms all rely on unique custom-built devices on which it is difficult to integrate new materials and structures for studying the breadth of theoretically proposed phenomena. Here we show high-resolution NFHT measurements using, as our sensing element, silicon nitride (SiN) freestanding nanomembranes$-$a widely available platform routinely used in materials and cavity optomechanics research. We measure NFHT by tracking the high mechanical quality (Q) factor ($>2\times10^6$) resonance of a membrane placed in the near-field of a hemispherical hot object. We find that high Q-factor enables a temperature resolution ($1.2\times10^{-6} \ \mathrm{K}$) that is unparalleled in previous NFHT experiments. Results are in good agreement with a custom-built model combining heat transport in nanomembranes and the effect of non-uniform stress/temperature on the resonator eigenmodes.

physics.class-ph

Integrated near-field thermo-photovoltaics for on-demand heat recycling

The energy transferred via thermal radiation between two surfaces separated by nanometers distances (near-field) can be much larger than the blackbody limit. However, realizing a reconfigurable platform that utilizes this energy exchange mechanism to generate electricity in industrial and space applications on-demand, remains a challenge. The challenge lies in designing a platform that can separate two surfaces by a small and tunable gap while simultaneously maintaining a large temperature differential. Here, we present a fully integrated, reconfigurable and scalable platform operating in near-field regime that performs controlled heat extraction and energy recycling. Our platform relies on an integrated nano-electromechanical system (NEMS) that enables precise positioning of a large area thermal emitter within nanometers distances from a room-temperature germanium photodetector to form a thermo-photovoltaic (TPV) cell. We show over an order of magnitude higher power generation $\mathrm{P_{gen} \sim 1.25 \, μW \cdot cm^{-2}}$ from our TPV cell by tuning the gap between a hot emitter ($\mathrm{T_E \sim 880 \, K}$) and the cold photodetector ($\mathrm{T_D \sim 300 \, K}$) from $\mathrm{\sim 500 \, nm}$ to $\mathrm{\sim 100 \, nm}$. The significant enhancement in $\mathrm{P_{gen}}$ at such small distances is a clear indication of near-field heat transfer effect. Our electrostatically controlled NEMS switch consumes negligible tuning power ($\mathrm{P_{gen}/P_{NEMS} \sim 10^4}$) and relies on conventional silicon-based process technologies.

physics.app-ph

Swept-Frequency Drumhead Mechanical Resonators

We demonstrate a high-Q ($>5 \times 10^{6}$) swept-frequency membrane mechanical resonator achieving octave resonance tuning via an integrated heater and an unprecedented acceleration noise floor below 1 $μ$g Hz$^{-1/2}$ for frequencies above 50 kHz. This device is compatible with established batch fabrication techniques, and its optical readout is compatible with low-coherence light sources (e.g., a monochromatic light-emitting diode). The device can also be mechanically stabilized (or driven) with the same light source via bolometric optomechanics, and we demonstrate laser cooling from room temperature to 10 K. Finally, this method of frequency tuning is well-suited to fundamental studies of mechanical dissipation; in particular, we recover the dissipation spectra of many modes, identifying material damping and coupling to substrate resonances as the dominant loss mechanisms.

physics.app-ph

On-chip thermo-optic tuning of suspended microresonators

Suspended optical microresonators are promising devices for on-chip photonic applications such as radio-frequency oscillators, optical frequency combs, and sensors. Scaling up these devices demand the capability to tune the optical resonances in an integrated manner. Here, we design and experimentally demonstrate integrated on-chip thermo-optic tuning of suspended microresonators by utilizing suspended wire bridges and microheaters. We demonstrate the ability to tune the resonance of a suspended microresonator in silicon nitride platform by 9.7 GHz using 5.3 mW of heater power. The loaded optical quality factor (QL ~ 92,000) stays constant throughout the detuning. We demonstrate the efficacy of our approach by completely turning on and off the optical coupling between two evanescently coupled suspended microresonators.

physics.optics