Laser micromachining of arbitrarily complex and overhang-free SiN nanomechanical resonators

Abstract

Research on silicon nitride (SiN) nanomechanical resonators produces an exceptionally rich variety of resonator geometries, for which there is currently no available rapid prototyping solution. Experimental advances in nanobeam, trampoline, phononic bandgap, and soft-clamping structures all rely on conventional nanofabrication involving e-beam or photolithography, followed by various etching steps. These techniques are typically time-consuming, relatively inflexible, and often result in spurious residual SiN overhang that can degrade mechanical quality factors. In contrast, recent work has shown that simple resonant structures, such as nanobeams, can be prototyped by direct laser ablation of free-standing SiN membranes using a spatially distributed sequence of microholes that limits stress concentration. However, these early demonstrations were restricted to basic shapes, created by manually combining ablation routines for circles and straight lines. Here, we demonstrate the fabrication of arbitrarily complex geometries using an open-source software toolset--released with this publication--that automatically generates laser-ablated hole sequences directly from standard semiconductor layout files (i.e., GDSII). The software includes a layout alignment tool that compensates for the membrane orientation and dimensional variations, limiting material overhang to ~2 um. Using this toolset, we fabricate several resonator geometries, each in under 1 hour, two of which are exhaustively characterized as candidate structures for high-performance radiation sensing. The measured quality factors of these structures closely match finite element simulations and reach values up to 3.7 x 10^6. From these measurements, we extract material quality factors above 3700, which is on par with low-stress SiN unablated plain membranes and with comparable structures produced using conventional fabrication methods.