arXiv subjects

S. Burger

Publications and source records attributed to S. Burger.

At least 55 records · Page 3Linked to original sources

arXiv2009

Accurate simulation of light transmission through subwavelength apertures in metal films

We use the finite-element method for simulating light transmission through a 2D-periodic array of rectangular apertures in a film of highly conductive material. We report results with a relative error of the transmissivity lower than 0.01%. This is an improvement of about one order of magnitude compared to previously reported results. Further, the influence of corner and edge roundings on light transmission through the subwavelength apertures is investigated.

physics.optics↗

arXiv2009

Benchmark of Rigorous Methods for Electromagnetic Field Simulations

We have developed an interface which allows to perform rigorous electromagnetic field (EMF) simulations with the simulator JCMsuite and subsequent aerial imaging and resist simulations with the simulator Dr.LiTHO. With the combined tools we investigate the convergence of near-field and far-field results for different DUV masks. We also benchmark results obtained with the waveguide-method EMF solver included in Dr.LiTHO and with the finite-element-method EMF solver JCMsuite. We demonstrate results on convergence for dense and isolated hole arrays, for masks including diagonal structures, and for a large 3D mask pattern of lateral size 10 microns by 10 microns.

physics.optics↗

arXiv2009

Finite-Element Simulations of Light Propagation through Circular Subwavelength Apertures

Light transmission through circular subwavelength apertures in metallic films with surrounding nanostructures is investigated numerically. Numerical results are obtained with a frequency-domain finite-element method. Convergence of the obtained observables to very low levels of numerical error is demonstrated. Very good agreement to experimental results from the literature is reached, and the utility of the method is demonstrated in the investigation of the influence of geometrical parameters on enhanced transmission through the apertures.

physics.optics↗

arXiv2008

A Rigorous Finite-Element Domain Decomposition Method for Electromagnetic Near Field Simulations

Rigorous computer simulations of propagating electromagnetic fields have become an important tool for optical metrology and design of nanostructured optical components. A vectorial finite element method (FEM) is a good choice for an accurate modeling of complicated geometrical features. However, from a numerical point of view solving the arising system of linear equations is very demanding even for medium sized 3D domains. In numerics, a domain decomposition method is a commonly used strategy to overcome this problem. Within this approach the overall computational domain is split up into smaller domains and interface conditions are used to assure continuity of the electromagnetic field. Unfortunately, standard implementations of the domain decomposition method as developed for electrostatic problems are not appropriate for wave propagation problems. In an earlier paper we therefore proposed a domain decomposition method adapted to electromagnetic field wave propagation problems. In this paper we apply this method to 3D mask simulation.

physics.optics↗

arXiv2007

Electromagnetic Field Simulations of Isolated and Periodic 3D Photomask Patterns

We present rigorous 3D EMF simulations of isolated features on photomasks using a newly developed finite-element method. We report on the current status of the finite-element solver JCMsuite, incorporating higher-order edge elements, adaptive refinement methods, and fast solution algorithms. We demonstrate that rigorous and accurate results on light scattering off isolated features can be achived at relatively low computational cost, compared to the standard approach of simulations on large-pitch, periodic computational domains.

physics.optics↗

arXiv2007

3D Simulations of Electromagnetic Fields in Nanostructures using the Time-Harmonic Finite-Element Method

Rigorous computer simulations of propagating electromagnetic fields have become an important tool for optical metrology and optics design of nanostructured components. As has been shown in previous benchmarks some of the presently used methods suffer from low convergence rates and/or low accuracy of the results and exhibit very long computation times which makes application to extended 2D layout patterns impractical. We address 3D simulation tasks by using a finite-element solver which has been shown to be superior to competing methods by several orders of magnitude in accuracy and computational time for typical microlithography simulations. We report on the current status of the solver, incorporating higher order edge elements, adaptive refinement methods, and fast solution algorithms. Further, we investigate the performance of the solver in the 3D simulation project of light diffraction off an alternating phase-shift contact-hole mask.

physics.optics↗

arXiv2007

FEM investigation of leaky modes in hollow core photonic crystal fibers

Hollow-core holey fibers are promising candidates for low-loss guidance of light in various applications, e.g., for the use in laser guide star adaptive optics systems in optical astronomy. We present an accurate and fast method for the computation of light modes in arbitrarily shaped waveguides. Maxwell's equations are discretized using vectorial finite elements (FEM). We discuss how we utilize concepts like adaptive grid refinement, higher-order finite elements, and transparent boundary conditions for the computation of leaky modes in photonic crystal fibers. Further, we investigate the convergence behavior of our methods. We employ our FEM solver to design hollow-core photonic crystal fibers (HCPCF) whose cores are formed from 19 omitted cladding unit cells. We optimize the fiber geometry for minimal attenuation using multidimensional optimization taking into account radiation loss (leaky modes).

physics.optics↗

arXiv2007

Goal Oriented Adaptive Finite Element Method for the Precise Simulation of Optical Components

Adaptive finite elements are the method of choice for accurate simulations of optical components. However as shown recently by Bienstman et al. many finite element mode solvers fail to compute the propagation constant's imaginary part of a leaky waveguide with sufficient accuracy. In this paper we show that with a special goal oriented error estimator for capturing radiation losses this problem is overcome.

physics.optics↗

arXiv2006

Rigorous FEM-Simulation of EUV-Masks: Influence of Shape and Material Parameters

We present rigorous simulations of EUV masks with technological imperfections like side-wall angles and corner roundings. We perform an optimization of two different geometrical parameters in order to fit the numerical results to results obtained from experimental scatterometry measurements. For the numerical simulations we use an adaptive finite element approach on irregular meshes. This gives us the opportunity to model geometrical structures accurately. Moreover we comment on the use of domain decomposition techniques for EUV mask simulations. Geometric mask parameters have a great influence on the diffraction pattern. We show that using accurate simulation tools it is possible to deduce the relevant geometrical parameters of EUV masks from scatterometry measurements. This work results from a collaboration between Advanced Mask Technology Center (AMTC, mask fabrication), Physikalisch-Technische Bundesanstalt (PTB, scatterometry), Zuse Institute Berlin (ZIB), and JCMwave (numerical simulation).

physics.optics↗

arXiv2006

Rigorous Simulation of 3D Masks

We perform 3D lithography simulations by using a finite-element solver. To proof applicability to real 3D problems we investigate DUV light propagation through a structure of size 9 microns times 4 microns times 65 nm. On this relatively large computational domain we perform rigorous computations (No Hopkins) taking into account a grid of 11 times 21 source points with two polarization directions each. We obtain well converged results with an accuracy of the diffraction orders of about one percent. The results compare well to experimental aerial imaging results. We further investigate the convergence of 3D solutions towards quasi-exact results obtained with different methods.

physics.optics↗

arXiv2006

Benchmark of FEM, Waveguide and FDTD Algorithms for Rigorous Mask Simulation

An extremely fast time-harmonic finite element solver developed for the transmission analysis of photonic crystals was applied to mask simulation problems. The applicability was proven by examining a set of typical problems and by a benchmarking against two established methods (FDTD and a differential method) and an analytical example. The new finite element approach was up to 100 times faster than the competing approaches for moderate target accuracies, and it was the only method which allowed to reach high target accuracies.

physics.optics↗

arXiv2006

Advanced Finite Element Method for Nano-Resonators

Miniaturized optical resonators with spatial dimensions of the order of the wavelength of the trapped light offer prospects for a variety of new applications like quantum processing or construction of meta-materials. Light propagation in these structures is modelled by Maxwell's equations. For a deeper numerical analysis one may compute the scattered field when the structure is illuminated or one may compute the resonances of the structure. We therefore address in this paper the electromagnetic scattering problem as well as the computation of resonances in an open system. For the simulation efficient and reliable numerical methods are required which cope with the infinite domain. We use transparent boundary conditions based on the Perfectly Matched Layer Method (PML) combined with a novel adaptive strategy to determine optimal discretization parameters like the thickness of the sponge layer or the mesh width. Further a novel iterative solver for time-harmonic Maxwell's equations is presented.

physics.comp-ph↗

arXiv2005

Magnetic metamaterials at telecommunication and visible frequencies

Arrays of gold split-rings with 50-nm minimum feature size and with an LC resonance at 200-THz frequency (1500-nm wavelength) are fabricated. For normal incidence conditions, they exhibit a pronounced fundamental magnetic mode, arising from a coupling via the electric component of the incident light. For oblique incidence, a coupling via the magnetic component is demonstrated as well. Moreover, we identify a novel higher-order magnetic resonance at around 370 THz (800-nm wavelength) that evolves out of the Mie resonance for oblique incidence. Comparison with theory delivers good agreement and also shows that the structures allow for a negative magnetic permeability.

cond-mat.mtrl-sci↗

arXiv2005

Numerical Investigation of Light Scattering off Split-Ring Resonators

Recently, split ring-resonators (SRR's) have been realized experimentally in the near infrared (NIR) and optical regime. In this contribution we numerically investigate light propagation through an array of metallic SRR's in the NIR and optical regime and compare our results to experimental results. We find numerical solutions to the time-harmonic Maxwell's equations by using advanced finite-element-methods (FEM). The geometry of the problem is discretized with unstructured tetrahedral meshes. Higher order, vectorial elements (edge elements) are used as ansatz functions. Transparent boundary conditions and periodic boundary conditions are implemented, which allow to treat light scattering problems off periodic structures. This simulation tool enables us to obtain transmission and reflection spectra of plane waves which are incident onto the SRR array under arbitrary angles of incidence, with arbitrary polarization, and with arbitrary wavelength-dependencies of the permittivity tensor. We compare the computed spectra to experimental results and investigate resonances of the system.

cond-mat.mtrl-sci↗

arXiv2005

Optical microscopy via spectral modifications of a nano-antenna

The existing optical microscopes form an image by collecting photons emitted from an object. Here we report on the experimental realization of microscopy without the need for direct optical communication with the sample. To achieve this, we have scanned a single gold nanoparticle acting as a nano-antenna in the near field of a sample and have studied the modification of its intrinsic radiative properties by monitoring its plasmon spectrum.

physics.optics↗

arXiv2005

JCMmode: An Adaptive Finite Element Solver for the Computation of Leaky Modes

We present our simulation tool JCMmode for calculating propagating modes of an optical waveguide. As ansatz functions we use higher order, vectorial elements (Nedelec elements, edge elements). Further we construct transparent boundary conditions to deal with leaky modes even for problems with inhomogeneous exterior domains as for integrated hollow core Arrow waveguides. We have implemented an error estimator which steers the adaptive mesh refinement. This allows the precise computation of singularities near the metal's corner of a Plasmon-Polariton waveguide even for irregular shaped metal films on a standard personal computer.

physics.optics↗

arXiv2005

FEM Modelling of 3D Photonic Crystals and Photonic Crystal Waveguides

We present a finite-element simulation tool for calculating light fields in 3D nano-optical devices. This allows to solve challenging problems on a standard personal computer. We present solutions to eigenvalue problems, like Bloch-type eigenvalues in photonic crystals and photonic crystal waveguides, and to scattering problems, like the transmission through finite photonic crystals. The discretization is based on unstructured tetrahedral grids with an adaptive grid refinement controlled and steered by an error-estimator. As ansatz functions we use higher order, vectorial elements (Nedelec, edge elements). For a fast convergence of the solution we make use of advanced multi-grid algorithms adapted for the vectorial Maxwell's equations.

physics.optics↗

arXiv2003

Spectroscopy of Dark Soliton States in Bose-Einstein Condensates

Experimental and numerical studies of the velocity field of dark solitons in Bose-Einstein condensates are presented. The formation process after phase imprinting as well as the propagation of the emerging soliton are investigated using spatially resolved Bragg-spectroscopy of soliton states in Bose-Einstein condensates of Rubidium87. A comparison of experimental data to results from numerical simulations of the Gross-Pitaevskii equation clearly identifies the flux underlying a dark soliton propagating in a Bose-Einstein condensate. The results allow further optimization of the phase imprinting method for creating collective exitations of Bose-Einstein condensates.

cond-mat↗