Amorphous insulating MoS$_x$ films deposited by magnetron sputtering as a low-index optical coating
While much effort are now concentrated on exploration of crystalline form of MoS$_2$ as a two-dimensional material, we show that room-temperature DC magnetron sputtering from pressurized MoS$_2$ powder target produces amorphous MoS$_x$ films with optical properties fundamentally different from those of crystalline MoS$_2$. The films were found to have a sulfur content of approximately $x=1.8$, indicating sulfur deficiency. They are optically isotropic and exhibit rather low optical losses, with a refractive index of about 2 over the visible and near-infrared spectral range. Their compatibility with lift-off lithography and dry etching makes amorphous MoS$_x$ a promising material for integrated photonic applications.
cond-mat.mtrl-sci↗