arXiv subjects

Shurik Yatom

Publications and source records attributed to Shurik Yatom.

8 recordsLinked to original sources

arXiv2026

Multi-Diagnostic Characterization of Laser-Produced Tin Plasmas for EUV Lithography

We present a comprehensive characterization of laser-produced tin (Sn) plasmas relevant to extreme ultraviolet (EUV) lithography using a multi-diagnostic suite integrated into the new experimental platform, "SparkLight". Tin plasmas are generated by irradiating a continuously moving tin-coated wire with laser pulses (1064 nm, 10 ns, up to $5.7\times10^{10}$ W/cm$^2$) and probed via coherent Thomson scattering, laser interferometry, and EUV emission spectroscopy. Thomson scattering measurements reveal electron temperatures and densities that decay with distance from the target. Densities derived from Thomson scattering are cross-validated against laser interferometry, showing excellent agreement. Correlating the results of these laser diagnostics with spatially resolved EUV spectroscopy suggests that the bulk of useful EUV emission originates within 150 $\mu$m of the target and is generated under suboptimal plasma conditions. This work demonstrates a practical integrated approach for plasma characterization in EUV source development.

physics.plasm-ph↗

arXiv2024

Report on laser-induced fluorescence transitions relevant for the microelectronics industry and sustainability applications

A wide variety of feed gases are used to generate low-temperature plasmas for the microelectronics and the sustainability applications. These plasmas often have a complex combination of reactive and non-reactive species which may have spatial and temporal variations in the density, the temperature and the energy. Accurate knowledge of these parameters and their variations is critically important for understanding and advancing these applications through validated and predictive modeling and design of relevant devices. Laser-induced fluorescence (LIF) provides both spatial and temporally resolved information about the plasma-produced radicals, ions, and metastables. However, the use of this powerful diagnostic tool requires the knowledge of optical transitions including excitation and fluorescence wavelengths which may not be available or scattered through a huge literature domain. In this manuscript, we collected, analyzed and compiled the available transitions for laser-induced fluorescence for more than 160 chemical species relevant to the microelectronics industry and the sustainability applications. A list of species with overlapping LIF excitation and fluorescence wavelengths have been identified. This summary is intended to serve as a data reference for LIF transitions and should be updated in the future.

physics.plasm-ph↗

arXiv2024

Importance of Gas Heating in Capacitively Coupled Radiofrequency Plasma-assisted Synthesis of Carbon Nanomaterials

In pursuit of diamond nanoparticles, a capacitively-coupled radio frequency (CCRF) flow-through plasma reactor was operated with methane argon gas mixtures. Signatures of the final product obtained microscopically and spectroscopically indicated that the product was an amorphous form of graphite. This result was consistent irrespective of combinations of the macroscopic reactor settings. To explain the observed synthesis output, measurements of C2 and gas properties were carried out by laser-induced fluorescence and optical emission spectroscopy. Strikingly, the results indicated a strong gas temperature gradient of 100 K per mm from the center of the reactor to the wall. Based on additional plasma imaging, a model of hot constricted region (filamentation region) was then formulated. It illustrated that, while the hot constricted region was present, the bulk of the gas was not hot enough to facilitate diamond sp3 formation: characterized by much lower reaction rates, when compared to sp2, sp3 formation kinetics are expected to become exponentially slow. This result was further confirmed by experiments under identical conditions but with a H2/CH4 mixture, where no output material was detected: if graphitic sp2 formation was expected as the main output material from the methane feedstock, atomic hydrogen would then be expected to etch it away in situ, such that the net production of that sp2-hybridized solid material is nearly a zero.

physics.plasm-ph↗

arXiv2021

Determination of positive anode sheath in anodic carbon arc for synthesis of nanomaterials

In the atmospheric pressure anodic carbon arc, ablation of the anode serves as a feedstock of carbon for production of nanomaterials. It is known that the ablation of the graphite anode in this arc can have two distinctive modes with low and high ablation rates. The transition between these modes is governed by the power deposition at the arc attachment to the anode and depends on the gap between the anode and the cathode electrodes. Probe measurements combined with optical emission spectroscopy (OES) are used to analyze the voltage drop between the arc electrodes. These measurements corroborated previous predictions of a positive anode sheath (i.e. electron attracting sheath) in this arc, which appears in both low and high ablation modes. Another key result is a relatively low electron temperature (~ 0.6 eV) obtained from OES using a collisional radiative model. This result partially explains a higher arc voltage (~ 20 V) required to sustain the arc current of 50-70 A than predicted by existing simulations of this discharge.

physics.plasm-ph↗

arXiv2020

A low power flexible dielectric barrier discharge disinfects surfaces and improves the action of hydrogen peroxide

There is an urgent need for disinfection and sterilization devices accessible to the public that can be fulfilled by innovative strategies for using cold atmospheric pressure plasmas. Here we explore and evaluate an approach combining a flexible printed circuit design of a dielectric barrier discharge (DBD) with an environmentally safe chemical reagent for surface decontamination from bacterial contaminants. The device operates in ambient air without any additional gas flow at a power density of about 0.5 W/cm^2. Using a 3% hydrogen peroxide solution as a model reagent we demonstrate improved reduction in the bacterial load of a surface contaminant of >6log10 in 90 seconds, about 3log10 and 2log10 faster compared to hydrogen peroxide alone and the flexible DBD alone, respectively, for the same treatment time. The synergistic action of the plasma bioactive properties and hydrogen peroxide result in a dramatic improvement of surface disinfection. This opens new possibilities for using the low power flexible DBD plasma sources for surface disinfection and decontamination.

physics.plasm-ph↗

arXiv2020

Characterization of plasma and gas-phase chemistry during boron-nitride nanomaterial synthesis by laser-ablation of boron-rich targets

In this work, solid targets made from boron and boron nitride (BN) materials are ablated by a nanosecond pulsed laser at sub-atmospheric pressures of nitrogen and helium gases. Excited species in the ablation plume from the target are probed with spatiotemporally resolved optical emission spectroscopy (OES). Evaluation of chemical composition in the plasma plume revealed that for both boron-rich targets, emission from BN molecules is always observed in nitrogen-rich environments. In addition, BN molecules also present when ablating a boron nitride target in helium gas -- an indication that BN molecules in the plume may originate from the solid target. Furthermore, the ablation of BN target features emission of B2N molecules, regardless of the pressure and surrounding gas. These results suggest that the ablation of the BN target is more favorable for the generation of complex molecules containing boron and nitrogen species and possibly hint that BN is also more favorable feedstock for high-yield BN nanomaterial synthesis. Plasma parameters such as electron temperature (peak value of 1.3 eV) and density (peak value of 2x10^18 cm^-3) were also investigated in this work in order to discuss the chemical dynamics in the plume.

physics.plasm-ph↗

arXiv2019

Determining Gas Composition for Growth of BNNTs Using Thermodynamic Approach

A high-yield production of high-quality boron-nitride nanotubes (BNNTs) was reported recently in several publications. A boron-rich material is evaporated by a laser or plasma in a nitrogen-rich atmosphere to supply precursor gaseous species for nucleation and growth of BNNTs. Either hydrogen was added or pressure was increased in the system to achieve high yield and high purity of the synthesized nanotubes. According to the widely-accepted "root grow" mechanism, upon the gas cooling, boron droplets form first, then they adsorb nitrogen from surrounding gas species, and BNNTs grow on their surfaces. However, what are these precursor species that provide nitrogen for the growth is still an open question. To answer this question, we performed thermodynamic calculations of B-N mixture composition considering broad set of gas species. In enhancement of previous studies, the condensation of boron is now taken into account and is shown to have drastic effect on the gas chemical composition. B2N molecules were identified to be a major source of nitrogen for growth of BNNTs. Presence of B2N molecules in a B-N gas mixture was verified by our spectroscopic measurements during a laser ablation of boron-rich targets in nitrogen. It was shown that the increase of pressure has a quantitative effect on the mixture composition yielding increase of the precursor density. The hydrogen addition might open an additional channel of nitrogen supply to support growth of BNNTs. Nitrogen atoms react with abundant H2 molecules to form NH2 and then NH3 precursor species, instead of just recombining back to inert N2 molecules, as in the no-hydrogen case. In addition, thermodynamics was applied in conjunction with agglomeration theory to predict the size of boron droplets upon growth of BNNTs. Analytical relations for identification of crucial species densities were derived.

physics.chem-ph↗

arXiv2018

Synthesis of nanoparticles in carbon arc: measurements and modeling

This work studies the region of nanoparticle growth in atmospheric pressure carbon arc. Detection of the nanoparticles is realized via the planar laser induced incandescence (PLII) approach. Measurements revealed large clouds of nanoparticles in the arc periphery, bordering the region with high density of diatomic carbon molecules. Two-dimensional computational fluid dynamic simulations of the arc combined with thermodynamic modeling explain these results due to interplay of the condensation of carbon molecular species and the convection flow pattern. The results have shown that the nanoparticles are formed in the colder, outside regions of the arc and described the parameters necessary for coagulation.

physics.plasm-ph↗