Importance of Gas Heating in Capacitively Coupled Radiofrequency Plasma-assisted Synthesis of Carbon Nanomaterials

Abstract

In pursuit of diamond nanoparticles, a capacitively-coupled radio frequency (CCRF) flow-through plasma reactor was operated with methane argon gas mixtures. Signatures of the final product obtained microscopically and spectroscopically indicated that the product was an amorphous form of graphite. This result was consistent irrespective of combinations of the macroscopic reactor settings. To explain the observed synthesis output, measurements of C2 and gas properties were carried out by laser-induced fluorescence and optical emission spectroscopy. Strikingly, the results indicated a strong gas temperature gradient of 100 K per mm from the center of the reactor to the wall. Based on additional plasma imaging, a model of hot constricted region (filamentation region) was then formulated. It illustrated that, while the hot constricted region was present, the bulk of the gas was not hot enough to facilitate diamond sp3 formation: characterized by much lower reaction rates, when compared to sp2, sp3 formation kinetics are expected to become exponentially slow. This result was further confirmed by experiments under identical conditions but with a H2/CH4 mixture, where no output material was detected: if graphitic sp2 formation was expected as the main output material from the methane feedstock, atomic hydrogen would then be expected to etch it away in situ, such that the net production of that sp2-hybridized solid material is nearly a zero.