arXiv subjects

Xiaoyu Niu

Publications and source records attributed to Xiaoyu Niu.

5 recordsLinked to original sources

arXiv2026

The design of an optomechanical microphone using a photonic waveguide interferometer

We present an optomechanical microphone based on a diaphragm-integrated photonic waveguide Mach-Zehnder interferometer. Acoustic pressure deforms the MEMS diaphragm, inducing strain in the sensing waveguide and changing its optical path length. We analytically evaluate the optical and mechanical transduction mechanisms and key figures of merit, including signal-to-noise ratio, dynamic range, acoustic overload pressure, and minimum detectable pressure. Two design cases are considered: a MEMS microphone and a measurement microphone. The results indicate competitive performance but no substantial overall advantage over state-of-the-art microphones in conventional applications. The architecture may nevertheless offer advantages for high-temperature and other harsh-environment sensing applications.

eess.AS↗

arXiv2026

MEMS Microphones as Ultrasonic Transducers: Nonlinear Electrostatic Actuation and a Parametric Array Prototype

This paper investigates commercial-style capacitive MEMS microphone dies as air-coupled ultrasonic transmitters under nonlinear pull-in and snap-back actuation and demonstrates a compact parametric-array prototype. A single die produces large diaphragm displacement and measurable ultrasonic pressure in air. A 28-die array driven at 83 and 93 kHz generates a directional component at the 10 kHz difference frequency. Measurements are compared with analytical radiation theory and finite-element modeling, and the effects of aperture, fill factor, device uniformity, and receiver nonlinearity are discussed.

eess.AS↗

arXiv2026

Bimorph Lithium Niobate Piezoelectric Micromachined Ultrasonic Transducers

Piezoelectric micromachined ultrasonic transducers (PMUTs) are widely utilized in applications that demand mechanical resilience, thermal stability, and compact form factors. Recent efforts have sought to demonstrate that single-crystal lithium niobate (LN) is a promising PMUT material platform, offering high electromechanical coupling (k2) and bidirectional performance. In addition, advances in LN film transfer technology have enabled high quality periodically poled piezoelectric films (P3F), facilitating a bimorph piezoelectric stack without intermediate electrodes. In this work, we showcase a bimorph PMUT incorporating a mechanically robust, 20 $μ$m thick P3F LN active layer. We establish the motivation for LN PMUTs through a material comparison, followed by extensive membrane geometry optimization and subsequent enhancement of the PMUT's k2. We demonstrate a 775 kHz flexural mode device with a quality factor (Q) of 200 and an extracted k2 of 6.4\%, yielding a high transmit efficiency of 65 nm/V with a mechanically robust active layer. We leverage the high performance to demonstrate extreme-temperature resilience, showcasing stable device operation up to 600 $^\circ$C and survival up to 900 $^\circ$C, highlighting LN's potential as a resilient PMUT platform.

cond-mat.mtrl-sci↗

arXiv2025

Bimorph Lithium Niobate Piezoelectric Micromachined Ultrasonic Transducer

This work demonstrates a prototype bi-layer piezoelectric micromachined ultrasonic transducer (PMUT) based on transferred periodically poled piezoelectric film (P3F) X-cut lithium niobate (LN). Opposite in-plane polarizations in the piezoelectric film stack are employed to enable efficient lateral field excitation of the flexural mode. Thanks to its high piezoelectric coefficient and low dielectric loss, the X-cut LN exhibits high figure of merits (FoMs) as both sensors and transducers. The fabricated PMUT demonstrates an out-of-plane mode near 1 MHz with an electromechanical coupling of 3.6\%. Laser Doppler vibrometry further validates the finite element analysis, showing a peak center displacement of 340 pm/V. These results establish bi-layer P3F LN PMUTs as a promising platform for compact and high-performance ultrasonic transducers. Future work will focus on theoretical analysis, modeling of the measured data, improving the design of the transducer topology, and mitigating feedthrough effects.

physics.app-ph↗

arXiv2025

A Sparsity-Aware Autonomous Path Planning Accelerator with HW/SW Co-Design and Multi-Level Dataflow Optimization

Path planning is critical for autonomous driving, generating smooth, collision-free, feasible paths based on perception and localization inputs. However, its computationally intensive nature poses significant challenges for resource-constrained autonomous driving hardware. This paper presents an end-to-end FPGA-based acceleration framework targeting the quadratic programming (QP), core of optimization-based path planning. We employ a hardware-friendly alternating direction method of multipliers (ADMM) for QP solving and a parallelizable preconditioned conjugate gradient (PCG) method for linear systems. By analyzing sparse matrix patterns, we propose customized storage schemes and efficient sparse matrix multiplication units, significantly reducing resource usage and accelerating matrix operations. Our multi-level dataflow optimization strategy incorporates intra-operator parallelization and pipelining, inter-operator fine-grained pipelining, and CPU-FPGA system-level task mapping. Implemented on the AMD ZCU102 platform, our framework achieves state-of-the-art latency and energy efficiency, including 1.48x faster performance than the best FPGA-based design, 2.89x over an Intel i7-11800H CPU, 5.62x over an ARM Cortex-A57 embedded CPU, and 1.56x over a state-of-the-art GPU solution, along with a 2.05x throughput improvement over existing FPGA-based designs.

cs.AR↗