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arXiv · 2608.02203

MEMS Microphones as Ultrasonic Transducers: Nonlinear Electrostatic Actuation and a Parametric Array Prototype

Xiaoyu Niu·Zihuan Liu·Ehsan Vatankhah·Yuqi Meng·Neal A. Hall
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Abstract

This paper investigates commercial-style capacitive MEMS microphone dies as air-coupled ultrasonic transmitters under nonlinear pull-in and snap-back actuation and demonstrates a compact parametric-array prototype. A single die produces large diaphragm displacement and measurable ultrasonic pressure in air. A 28-die array driven at 83 and 93 kHz generates a directional component at the 10 kHz difference frequency. Measurements are compared with analytical radiation theory and finite-element modeling, and the effects of aperture, fill factor, device uniformity, and receiver nonlinearity are discussed.

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Xiaoyu Niu, Zihuan Liu, Ehsan Vatankhah, Yuqi Meng, Neal A. Hall. 2026-08-03. MEMS Microphones as Ultrasonic Transducers: Nonlinear Electrostatic Actuation and a Parametric Array Prototype. https://arxiv.org/abs/2608.02203

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