Searcharxiv⌕ Search

SEARCH · Searcharxiv

Results for “cs.OH”

Search indexed arXiv papers on artificial intelligence, large language models, computer vision and robotics. Read source abstracts and follow links to arXiv.

Quote a phrase for an exact phrase match. Source license links do not imply unrestricted reuse.

At least 235 records · Page 13Linked to original sources
arXiv2008

Comparison Between Damping Coefficients of Measured Perforated Micromechanical Test Structures and Compact Models

Measured damping coefficients of six different perforated micromechanical test structures are compared with damping coefficients given by published compact models. The motion of the perforated plates is almost translational, the surface shape is rectangular, and the perforation is uniform validating the assumptions made for compact models. In the structures, the perforation ratio varies from 24% - 59%. The study of the structure shows that the compressibility and inertia do not contribute to the damping at the frequencies used (130kHz - 220kHz). The damping coefficients given by all four compact models underestimate the measured damping coefficient by approximately 20%. The reasons for this underestimation are discussed by studying the various flow components in the models.

cs.OH↗
arXiv2008

RF-MEMS beam components : FEM modelling and experimental identification of pull-in in presence of residual stress

In this paper an experimental validation of numerical approaches aimed to predict the coupled behaviour of microbeams for out-of-plane bending tests is performed. This work completes a previous investigation concerning in plane microbeams bending. Often out-of-plane microcantilevers and clamped-clamped microbeams suffer the presence of residual strain and stress, which affect the value of pull-in voltage. In case of microcantilever an accurate modelling includes the effect of the initial curvature due to microfabrication. In double clamped microbeams a preloading applied by tensile stress is considered. Geometrical onlinearity caused by mechanical coupling between axial and flexural behaviour is detected and modelled. Experimental results demonstrate a good agreement between FEM approaches proposed and tests. A fairly fast and accurate prediction of pull-in condition is performed, thus numerical models can be used to identify residual stress in microbridges by reverse analysis from the measured value of pull-in voltage.

cs.OH↗
arXiv2008

Validation of compact models of microcantilever actuators for RF-MEMS application

Microcantilever specimens for in-plane and out-ofplane bending tests are here analyzed. Experimental validation of 2D and 3D numerical models is performed. Main features of in-plane and out-of-plane layouts are then discussed. Effectiveness of plane models to predict pull-in in presence of geometric nonlinearity due to a large tip displacement and initial curvature of microbeam is investigated. The paper is aimed to discuss the capability of 2D models to be used as compact tools to substitute some model order reduction techniques, which appear unsuitable in presence of both electromechanical and geometric nonlinearities.

cs.OH↗
arXiv2008

Numerical Investigation of Laser-Assisted Nanoimprinting on a Copper Substrate from a Perspective of Heat Transfer Analysis

The technique of laser-assisted nanoimprinting lithography (LAN) has been proposed to utilize an excimer laser to irradiate through a quartz mold and melts a thin polymer film on the substrate for micro- to nano-scaled fabrications. In the present study, the novel concept of that copper was adopted as the substrate instead of silicon, which is conventionally used, was proposed. The micro/nano structures on the copper substrate could be fabricated by chemical/electrochemical etching or electroforming ; following by the patterns have been transferred onto the substrate using LAN process. Alternatives of the substrate materials could lead versatile applications in micro/nano-fabrication. To demonstrate the feasibility of this concept numerically, this study introduced optical multiple reflection theory to perform both analytical and numerical modeling during the process and to predict the thermal response theoretically.

cs.OH↗
arXiv2008

Micro-electroforming metallic bipolar electrodes for mini-DMFC stacks

This paper describes the development of metallic bipolar plate fabrication using micro-electroforming process for mini-DMFC (direct methanol fuel cell) stacks. Ultraviolet (UV) lithography was used to define micro-fluidic channels using a photomask and exposure process. Micro-fluidic channels mold with 300 micrometers thick and 500 micrometers wide were firstly fabricated in a negative photoresist onto a stainless steel plate. Copper micro-electroforming was used to replicate the micro-fluidic channels mold. Following by sputtering silver (Ag) with 1.2 micrometers thick, the metallic bipolar plates were completed. The silver layer is used for corrosive resistance. The completed mini-DMFC stack is a 2x2 cm2 fuel cell stack including a 1.5x1.5 cm2 MEA (membrane electrode assembly). Several MEAs were assembly into mini-DMFC stacks using the completed metallic bipolar plates. All test results showed the metallic bipolar plates suitable for mini-DMFC stacks. The maximum output power density is 9.3mW/cm2 and current density is 100 mA/cm2 when using 8 vol. % methanol as fuel and operated at temperature 30 degrees C. The output power result is similar to other reports by using conventional graphite bipolar plates. However, conventional graphite bipolar plates have certain difficulty to be machined to such micro-fluidic channels. The proposed micro-electroforming metallic bipolar plates are feasible to miniaturize DMFC stacks for further portable 3C applications.

cs.OH↗
arXiv2008

On the determination of Poisson's ratio of stressed monolayer and bilayer submicron thick films

In this paper, the bulge test is used to determine the mechanical properties of very thin dielectric membranes. Commonly, this experimental method permits to determine the residual stress (s0) and biaxial Young's modulus (E/(1-u)). Associating square and rectangular membranes with different length to width ratios, the Poisson's ratio (u) can also be determined. LPCVD Si3N4 monolayer and Si3N4/SiO2 bilayer membranes, with thicknesses down to 100 nm, have been characterized giving results in agreement with literature for Si3N4, E = 212 $\pm$ 14 GPa, s0 = 420 $\pm$ 8 and u = 0.29.

cs.OH↗
arXiv2008

New high fill-factor triangular micro-lens array fabrication method using UV proximity printing

A simple and effective method to fabricate a high fill-factor triangular microlens array using the proximity printing in lithography process is reported. The technology utilizes the UV proximity printing by controlling a printing gap between the mask and substrate. The designed approximate triangle microlens array pattern can be fabricated the high fill-factor triangular microlens array in photoresist. It is due to the UV light diffraction to deflect away from the aperture edges and produce a certain exposure in photoresist material outside the aperture edges. This method can precisely control the geometric profile of high fill factor triangular microlens array. The experimental results showed that the triangular micro-lens array in photoresist could be formed automatically when the printing gap ranged from 240 micrometers to 840 micrometers. The gapless triangular microlens array will be used to increases of luminance for backlight module of liquid crystal displays.

cs.OH↗
arXiv2008

Design Optimization for an Electro-Thermally Actuated Polymeric Microgripper

Thermal micro-actuators are a promising solution to the need for large-displacement, gentle handling force, low-power MEMS actuators. Potential applications of these devices are micro-relays, assembling and miniature medical instrumentation. In this paper the development of thermal microactuators based on SU-8 polymer is described. The paper presents the development of a new microgripper which can realize a movement of the gripping arms with possibility for positioning and manipulating of the gripped object. Two models of polymeric microgripper electrothermo- mechanical actuated, using low actuation voltages, designed for SU-8 polymer fabrication were presented. The electro-thermal microgrippers were designed and optimized using finite element simulations. Electro-thermo-mechanical simulations based on finite element method were performed for each of the model in order to compare the results. Preliminary experimental tests were carried out.

cs.OH↗
arXiv2008

Design And Fabrication of High Numerical Aperture And Low Aberration Bi-Convex Micro Lens Array

Micro lens array is crucial in various kinds of optical and electronic applications. A micro lens array with high numerical aperture (NA) and low aberration is in particular needed. This research is aimed to design and fabricate such a micro lens array with simple structure while keeps the same NA of a same-diameter hemisphere lens. A bi-convex semispherical micro lens array, with corresponding NA 0.379, by PDMS is first designed and analyzed. Experiments are further conducted to fabricate the designed micro lens array by the thermal reflow process. The formed profile is then sputtered with copper to serve as the mold. The front and the rear micro lens array are fabricated by plating PDMS to the mold and then assembled to form the designed micro lens array.

cs.OH↗
arXiv2008

Micromachined Inclinometer Based on Fluid Convection

This paper presents a numerical simulation and experimental results of a one-dimensional thermal inclinometer with the cavity filled of gas and liquid. The sensor principle consists of one heating resistor placed between two detectors. When the resistor is electrically powered, it creates a symmetrical temperature profile inside a micromachined silicon cavity. By applying a tilt to the sensor, the profile shifts in the same direction of the sensible axis corresponding to the horizontal one to one. The temperature profile and the sensitivity according to the CO2 gas and mineral oil SAE50 have been studied using numerical resolution of fluid dynamics equations with the computational fluid dynamics (CFD) software package Fluent V6.2. We have shown that the sensitivity of liquid sensors is higher than the gas sensors one. By using micromachined silicon technique, a thermal inclinometer with one pair of detectors placed at 300 um from the heater has been made. Experimental measurements corroborate with the numerical simulation.

cs.OH↗
arXiv2008

Model Based Sensor System for Temperature Measurement in R744 Air Conditioning Systems

The goal is the development of a novel principle for the temperature acquisition of refrigerants in CO2 air conditioning systems. The new approach is based on measuring the temperature inside a pressure sensor, which is also needed in the system. On the basis of simulative investigations of different mounting conditions functional relations between measured and medium temperature will be derived.

cs.OH↗
arXiv2008

High Aspect Pattern Formation by Integration of Micro Inkjetting and Electroless Plating

This paper reports on formation of high aspect micro patterns on low temperature co-fired ceramic (LTCC) substrates by integrating micro inkjetting with electroless plating. Micro inkjetting was realized by using an inkjetting printer that ejects ink droplets from a printhead. This printhead consists of a glass nozzle with a diameter of 50 micrometers and a piezoelectric transducer that is coated on the nozzle. The silver colloidal solution was inkjetted on a sintered CT800 ceramic substrate, followed by curing at 200 degrees C for 60 minutes. As a result, the silver trace with a thickness of 200 nm was obtained. The substrate, with the ejected silver thin film as the seed layer, was then immersed into a preinitiator solution to coat a layer of palladium for enhancing the deposition of nickel. Electroless nickel plating was successfully conducted at a rate of 0.39 micrometers /min, and the thickness of traces was plated up to 84 micrometers. This study demonstrates that the integration of inkjetting with plating is an effective method to form high aspect patterns at the demand location.

cs.OH↗
arXiv2008

A Nanostructual Microwave Probe Used for Atomic Force Microscope

In order to develop a new structure microwave probe, the fabrication of AFM probe on the GaAs wafer was studied. A waveguide was introduced by evaporating Au film on the top and bottom surfaces of the GaAs AFM probe. A tip having 8 micrometers high, and curvature radius about 50 nm was formed. The dimensions of the cantilever are 250x30x15 micrometers. The open structure of the waveguide at the tip of the probe was introduced by using FIB fabrication. AFM topography of a grating sample was measured by using the fabricated GaAs microwave probe. The fabricated probe was found having nanometer scale resolution, and microwave emission was detected successfully at the tip of the probe by approaching Cr-V steel and Au wire samples.

cs.OH↗
arXiv2008

High Density out-of-Plane Microprobe Array

MEMS technology has been developed rapidly in the last few years. More and more special micro structures were discussed in several publications. However, all of the structures were produced by consist of the three fundamental structures, which included bridge, cantilever and membrane structures. Even the more complex structures were no exception. The cantilever with the property of simple design and easy fabrication among three kinds of fundamental structure, therefore, it was popular used in the design of MEMS device.

cs.OH↗
arXiv2008

Simulation of Coating -Visco-Elastic liquid in the Mico-Nip of Metering Size Press

For a set of operating conditions and coating color formulations, undesirable phenomena like color spitting and coating ribs may be triggered in the Micro-nip during the coating process. Therefore, our interest in this work focus on another parameter affect on the undesirable phenomena as the vortices in the Micro-nip. The problem deals with the flow through the Micro-nip of metering size press. The flow enters and exits at a tangential velocity of 20 m/s between two rollers with diameter 80 cm and 60 -m apart. In the upper and bottom part of the domain the angular velocity is 314 rad /s. It has one sub-domain. Previous studies focus on the Micro-nip without considering the inertia and the viscoelasticity of the material. Roll coating is a technique commonly used in the coating industry to meter a thin fluid film on a moving substrate. During the film formation, the fluid is subjected to very high shear and extensional rates over a very short period of time. The fluid domain changes as a function of the hydrodynamic pressure within the nip as a result of the deformable cover usually used on one of the rolls. The free surface also adds more complexity to the flow due to the force equilibrium in the fluid gas interface. Last of all, the rheological behavior of the coating fluid is usually non-Newtonian, so the metering flow hydrodynamics is finally very difficult to describe. It is concluded that the normal forces of micro-nip increases with increasing the inhibitors. Therefore, it affects on the smoothness and creates defects. On the other hand, it can be concluded that the creation of big vortex in the middle of micro-nip affects on the coating liquid behavior.

cs.OH↗
arXiv2008

A Microcantilever-based Gas Flow Sensor for Flow Rate and Direction Detection

The purpose of this paper is to apply characteristics of residual stress that causes cantilever beams to bend for manufacturing a micro-structured gas flow sensor. This study uses a silicon wafer deposited silicon nitride layers, reassembled the gas flow sensor with four cantilever beams that perpendicular to each other and manufactured piezoresistive structure on each micro-cantilever by MEMS technologies, respectively. When the cantilever beams are formed after etching the silicon wafer, it bends up a little due to the released residual stress induced in the previous fabrication process. As air flows through the sensor upstream and downstream beam deformation was made, thus the airflow direction can be determined through comparing the resistance variation between different cantilever beams. The flow rate can also be measured by calculating the total resistance variations on the four cantilevers.

cs.OH↗
arXiv2008

Process nano scale mechanical properties measurement of thin metal films using a novel paddle cantilever test structure

A new technique was developed for studying the mechanical behavior of nano-scale thin metal films on substrate is presented. The test structure was designed on a novel "paddle" cantilever beam specimens with dimensions as few hundred nanometers to less than 10 nanometers. This beam is in triangle shape in order to provide uniform plane strain distribution. Standard clean room processing was used to prepare the paddle sample. The experiment can be operated by using the electrostatic deflection on the paddle uniform distributed stress cantilever beam and then measure the deposited thin metal film materials on top of it. A capacitance technique was used to measurement on the other side of the deflected plate to measure its deflection with respect to the force. The measured strain was converted through the capacitance measurement for the deflection of the cantilever. System performance on the residual stress measurement of thin films are calculated with three different forces on the "paddle" cantilever beam, including the force due to the film, compliance force and electrostatic force.

cs.OH↗