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arXiv · 0805.0933

High Quality Factor Silicon Cantilever Driven by PZT Actuator for Resonant Based Mass Detection

Jian Lu·T. Ikehara·Yi Zhang·Takashi Mihara·Toshihiro Itoh·Ryutaro Maeda
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Abstract

A high quality factor (Q-factor) piezoelectric lead zirconat titanate (PZT) actuated single crystal silicon cantilever was proposed in this paper for resonant based ultra-sensitive mass detection. Energy dissipation from intrinsic mechanical loss of the PZT film was successfully compressed by separating the PZT actuator from resonant structure. Excellent Q-factor, which is several times larger than conventional PZT cantilever, was achieved under both atmospheric pressure and reduced pressures. For a 30 micrometer-wide 100 micrometer-long cantilever, Q-factor was measured as high as 1113 and 7279 under the pressure of 101.2 KPa and 35 Pa, respectively. Moreover, it was found that high-mode vibration can be realized by the cantilever for the pursuit of great Q-factor, while support loss became significant because of the increased vibration amplitude at the actuation point. An optimized structure using node-point actuation was suggested then to suppress corresponding energy dissipation.

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Jian Lu, T. Ikehara, Yi Zhang, Takashi Mihara, Toshihiro Itoh, Ryutaro Maeda. 2008-05-07. High Quality Factor Silicon Cantilever Driven by PZT Actuator for Resonant Based Mass Detection. https://arxiv.org/abs/0805.0933

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