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arXiv · 0805.0934

A New Four States High Deflection Low Actuation Voltage Electrostatic Mems Switch for RF Applications

Renaud Robin·Salim Touati·Karim Segueni·Olivier Millet·Lionel Buchaillot
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Abstract

This paper presents a new electrostatic MEMS (MicroElectroMechanical System) based on a single high reliability totally free flexible membrane. Using four electrodes, this structure enables four states which allowed large deflections (4$μ$m) with low actuation voltage (7,5V). This design presents also a good contact force and improve the restoring force of the structure. As an example of application, a Single Pole Double Throw (SPDT) for 24GHz applications, based on this design, has been simulated.

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Renaud Robin, Salim Touati, Karim Segueni, Olivier Millet, Lionel Buchaillot. 2008-05-07. A New Four States High Deflection Low Actuation Voltage Electrostatic Mems Switch for RF Applications. https://arxiv.org/abs/0805.0934

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