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arXiv · 1008.3325

Fabrication of superconducting MgB2 thin films by magnetron co-sputtering on (001) MgO substrates

Savio Fabretti·Patrick Thomas·Markus Meinert·Andy Thomas
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Abstract

We fabricated superconducting MgB2 thin films on (001) MgO substrates. The samples were prepared by magnetron rf and dc co-sputtering on heated substrates. They were annealed ex-situ for one hour at temperatures between 450°C and 750°C. We will show that the substrate temperature during the sputtering process and the post annealing temperatures play a crucial role in forming MgB2 superconducting thin films. We achieved a critical onset temperature of 27.1K for a film thickness of 30nm. The crystal structures were measured by x-ray diffraction.

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Savio Fabretti, Patrick Thomas, Markus Meinert, Andy Thomas. 2010-10-26. Fabrication of superconducting MgB2 thin films by magnetron co-sputtering on (001) MgO substrates. https://arxiv.org/abs/1008.3325

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