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arXiv · 1111.1703

Control of Material Damping in High-Q Membrane Microresonators

P. -L. Yu·T. P. Purdy·C. A. Regal
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Abstract

We study the mechanical quality factors of bilayer aluminum/silicon-nitride membranes. By coating ultrahigh-Q Si3N4 membranes with a more lossy metal, we can precisely measure the effect of material loss on Q's of tensioned resonator modes over a large range of frequencies. We develop a theoretical model that interprets our results and predicts the damping can be reduced significantly by patterning the metal film. Using such patterning, we fabricate Al-Si3N4 membranes with ultrahigh Q at room temperature. Our work elucidates the role of material loss in the Q of membrane resonators and informs the design of hybrid mechanical oscillators for optical-electrical-mechanical quantum interfaces.

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P. -L. Yu, T. P. Purdy, C. A. Regal. 2012-01-11. Control of Material Damping in High-Q Membrane Microresonators. https://doi.org/10.1103/physrevlett.108.083603

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