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arXiv · 1205.2383

New DRIE-Patterned Electrets for Vibration Energy Harvesting

S. Boisseau·A. -B. Duret·J. -J. Chaillout·G. Despesse
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Abstract

This paper is about a new manufacturing process aimed at developing stable SiO2/Si3N4 patterned electrets using a Deep Reactive Ion Etching (DRIE) step for an application in electret-based Vibration Energy Harvesters (e-VEH). This process consists in forming continuous layers of SiO2/Si3N4 electrets in order to limit surface conduction phenomena and is a new way to see the problem of electret patterning. Experimental results prove that patterned electrets charged by a positive corona discharge show excellent stability with high surface charge densities that may reach 5mC/m^2 on 1.1μm-thick layers, even with fine patterning and harsh temperature conditions (up to 250°C). This paves the way to new e-VEH designs and manufacturing processes.

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S. Boisseau, A. -B. Duret, J. -J. Chaillout, G. Despesse. 2012-05-10. New DRIE-Patterned Electrets for Vibration Energy Harvesting. https://doi.org/10.1051/epjconf%2F20123302010

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