High quality factor mg-scale silicon mechanical resonators for 3-mode optoacoustic parametric amplifiers

Francis Achilles Torres; Phillip Meng; Li Ju; Chunnong Zhao; David Gerald Blair; Kai-Yu Liu; Shiuh Chao; Mariusz Martyniuk; Isabelle Roch-Jeune; Raffaele Flaminio; Christophe Michel

arXiv · 1303.6595

High quality factor mg-scale silicon mechanical resonators for 3-mode optoacoustic parametric amplifiers

Francis Achilles Torres·Phillip Meng·Li Ju·Chunnong Zhao·David Gerald Blair·Kai-Yu Liu·Shiuh Chao·Mariusz Martyniuk·Isabelle Roch-Jeune·Raffaele Flaminio·Christophe Michel

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Abstract

Milligram-scale resonators have been shown to be suitable for the creation of 3-mode optoacoustic parametric amplifiers, based on a phenomena first predicted for advanced gravitational-wave detectors. To achieve practical optoacoustic parametric amplification, high quality factor resonators are required. We present millimetre-scale silicon resonators designed to exhibit a torsional vibration mode with a frequency in the 10^5 - 10^6 Hz range, for observation of 3-mode optoacoustic interactions in a compact table-top system. Our design incorporates an isolation stage and minimizes the acoustic loss from optical coating. We observe a quality factor of 7.5 x 10^5 for a mode frequency of 401.5 kHz, at room temperature and pressure of 10^-3 Pa. We confirmed the mode shape by mapping the amplitude response across the resonator and comparing to finite element modelling. This study contributes towards the development of 3-mode optoacoustic parametric amplifiers for use in novel high-sensitivity signal transducers and quantum measurement experiments.

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Francis Achilles Torres, Phillip Meng, Li Ju, Chunnong Zhao, David Gerald Blair, Kai-Yu Liu, Shiuh Chao, Mariusz Martyniuk, Isabelle Roch-Jeune, Raffaele Flaminio, Christophe Michel. 2013-03-25. High quality factor mg-scale silicon mechanical resonators for 3-mode optoacoustic parametric amplifiers. https://arxiv.org/abs/1303.6595

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