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arXiv · 1304.7953

Parameter Extraction and Support-Loss in MEMS Resonators

P. G. Steeneken·J. J. M. Ruigrok·S. Kang·J. T. M. van Beek·J. Bontemps·J. J. Koning
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Abstract

In this paper it is shown how the equivalent circuit parameters of a MEMS resonator can be simply obtained from an eigenfrequency simulation. Additionally, it is demonstrated that the Q-factor as a result of support losses in a MEMS resonator can be determined using a matched boundary layer. The method is applied to calculate the frequency dependent admittance of a diamond disk resonator. Results agree well with measurements and analytic results. Comparison to a frequency response analysis establishes the validity of the method and shows that it results in a large reduction of the simulation time.

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P. G. Steeneken, J. J. M. Ruigrok, S. Kang, J. T. M. van Beek, J. Bontemps, J. J. Koning. 2013-04-30. Parameter Extraction and Support-Loss in MEMS Resonators. https://arxiv.org/abs/1304.7953

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