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arXiv · 1310.0342

A new dimension for piezo actuators: Free-form out-of-plane displacement of single piezo layers

Matthias C Wapler·Jens Brunne·Ulrike Wallrabe
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Abstract

We present a controlled mode of "topological" displacement of homogeneous piezo films that arises solely from an inhomogeneous in-plane strain due to an inhomogeneous polarization. For the rotationally symmetric case, we develop a theoretical model that analytically relates the shape of the displacement to the polarization for the cases of in-plane and out-of-plane polarization. This is verified for several examples, and we further demonstrate controlled asymmetric deformations.

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Matthias C Wapler, Jens Brunne, Ulrike Wallrabe. 2013-09-12. A new dimension for piezo actuators: Free-form out-of-plane displacement of single piezo layers. https://doi.org/10.1088/0964-1726%2F22%2F10%2F102001

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