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arXiv · 1310.2222

Photonic Crystal Cavities in Cubic (3C) Polytype Silicon Carbide Films

Marina Radulaski·Thomas M. Babinec·Sonia Buckley·Armand Rundquist·J Provine·Kassem Alassaad·Gabriel Ferro·Jelena Vučković
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Abstract

We present the design, fabrication, and characterization of high quality factor and small mode volume planar photonic crystal cavities from cubic (3C) thin films (thickness ~ 200 nm) of silicon carbide (SiC) grown epitaxially on a silicon substrate. We demonstrate cavity resonances across the telecommunications band, with wavelengths from 1,250 - 1,600 nm. Finally, we discuss possible applications in nonlinear optics, optical interconnects, and quantum information science.

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Marina Radulaski, Thomas M. Babinec, Sonia Buckley, Armand Rundquist, J Provine, Kassem Alassaad, Gabriel Ferro, Jelena Vučković. 2013-11-30. Photonic Crystal Cavities in Cubic (3C) Polytype Silicon Carbide Films. https://doi.org/10.1364/oe.21.032623

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