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arXiv · 1407.2982

Linear and nonlinear capacitive coupling of electro-opto-mechanical photonic crystal cavities

Alessandro Pitanti·Johannes M. Fink·Amir H. Safavi-Naeini·Chan U. Lei·Jeff T. Hill·Alessandro Tredicucci·Oskar Painter
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Abstract

We fabricate and characterize a microscale silicon electro-opto-mechanical system whose mechanical motion is coupled capacitively to an electrical circuit and optically via radiation pressure to a photonic crystal cavity. To achieve large electromechanical interaction strength, we implement an inverse shadow mask fabrication scheme which obtains capacitor gaps as small as 30 nm while maintaining a silicon surface quality necessary for minimizing optical loss. Using the sensitive optical read-out of the photonic crystal cavity, we characterize the linear and nonlinear capacitive coupling to the fundamental 63 MHz in-plane flexural motion of the structure, showing that the large electromechanical coupling in such devices may be suitable for realizing efficient microwave-to-optical signal conversion.

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Alessandro Pitanti, Johannes M. Fink, Amir H. Safavi-Naeini, Chan U. Lei, Jeff T. Hill, Alessandro Tredicucci, Oskar Painter. 2014-07-10. Linear and nonlinear capacitive coupling of electro-opto-mechanical photonic crystal cavities. https://arxiv.org/abs/1407.2982

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