arXiv · 1407.6867
Determination of effective mechanical properties of a double-layer beam by means of a nano-electromechanical transducer
Abstract
We investigate the mechanical properties of a doubly-clamped, double-layer nanobeam embedded into an electromechanical system. The nanobeam consists of a highly pre-stressed silicon nitride and a superconducting niobium layer. By measuring the mechanical displacement spectral density both in the linear and the nonlinear Duffing regime, we determine the pre-stress and the effective Young's modulus of the nanobeam. An analytical double-layer model quantitatively corroborates the measured values. This suggests that this model can be used to design mechanical multilayer systems for electro- and optomechanical devices, including materials controllable by external parameters such as piezoelectric, magnetrostrictive, or in more general multiferroic materials.
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Fredrik Hocke, Matthias Pernpeintner, Xiaoqing Zhou, Albert Schliesser, Tobias J. Kippenberg, Hans Huebl, Rudolf Gross. 2014-07-25. Determination of effective mechanical properties of a double-layer beam by means of a nano-electromechanical transducer. https://doi.org/10.1063/1.4896785
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