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arXiv · 1502.01889

Identification of annealing temperature for high-$κ$-based gate oxides using differential scanning calorimetry

Debaleen Biswas·Anil Kumar Sinha·Supratic Chakraborty
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Abstract

This article identifies the process of crystallization of thin high-$κ$ dielectric films and an optimal range of annealing temperature in the field of high-$κ$ dielectric-based metal-oxide-semiconductor (MOS) technology for its improved electrical performances. Differential Scanning Calorimetry (DSC) technique is employed to understand the thermal behaviour of thin high-$κ$ dielectric films of HfO$_2$, deposited by rf sputtering, on Si. The exothermic trends of the DSC signal and Grazing Incidence X-ray diffraction (GIXRD) data indicate an amorphous to crystalline transition in the high-$κ$ film at higher temperature. The enthalpy-temperature variation shows a glass temperature (T$_g$) at $\sim$ 590 $^o$C beyond which an amorphous to m-HfO$_2$ crystalline transition takes place. Further, the Hf-Silicate formation, observed in DSC measurement and corroborated by Fourier transformed Infrared Spectroscopy (FT-IR) studies, indicates that the process of formation of Hf-Silicate begins at $\sim$ 717 $^oC$. High-frequency (HF) capacitance-voltage $(C-V)$ and current density - voltage $(J-V)$ characteristics establish that the crystallization of the film is not the root cause of degradation of the electrical properties of the high-$κ$-based MOS devices, rather the device degrades due to formation of interfacial Hf-Silicate.

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Debaleen Biswas, Anil Kumar Sinha, Supratic Chakraborty. 2015-07-11. Identification of annealing temperature for high-$κ$-based gate oxides using differential scanning calorimetry. https://doi.org/10.1116/1.4929442

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