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arXiv · 1504.07533

Overcoming limitations of nanomechanical resonators with simultaneous resonances

Najib Kacem·Sébastien Baguet·Laurent Duraffourg·Guillaume Jourdan·Régis Dufour·Sébastien Hentz
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Abstract

Dynamic stabilization by simultaneous primary and superharmonic resonances for high order nonlinearity cancellation is demonstrated with an electrostatically-actuated, piezoresistively-transduced nanomechanical resonator. We prove experimentally how the combination of both the third-order nonlinearity cancellation and simultaneous resonances can be used to linearly drive a nanocantilever up to very large amplitudes compared to fundamental limits like pull-in occurrence, opening the way towards resonators with high frequency stability for high-performance sensing or time reference.

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Najib Kacem, Sébastien Baguet, Laurent Duraffourg, Guillaume Jourdan, Régis Dufour, Sébastien Hentz. 2015-04-27. Overcoming limitations of nanomechanical resonators with simultaneous resonances. https://doi.org/10.1063/1.4928711

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