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arXiv · 1509.02694

Large-area epitaxial growth of MoSe2 via an incandescent molybdenum source

Man-Kit Cheng·Jing Liang·Ying-Hoi Lai·Liang-Xi Pang·Yi Liu·Junying Shen·Jianqiang Hou·Qing Lin He·Bochao Xu·Junshu Chen·Gan Wang·Chang Liu·Rolf Lortz·Iam-Keong Sou
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Abstract

We have developed an incandescent Mo source to fabricate large-area single-crystalline MoSe2 thin films. The as-grown MoSe2 thin films were characterized using transmission electron microscopy, energy dispersive X-ray spectroscopy, atomic force microscopy, Raman spectroscopy, photoluminescence, reflection high energy electron diffraction (RHEED) and angular resolved photoemission spectroscopy (ARPES). A new Raman characteristic peak at 1591 cm-1 was identified. Results from Raman spectroscopy, photoluminescence, RHEED and ARPES studies consistently reveal that large-area single crystalline mono-layer of MoSe2 could be achieved by this technique. This technique enjoys several advantages over conventional approaches and could be extended to the growth of other two-dimensional layered materials containing a low-vapor-pressure element.

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Man-Kit Cheng, Jing Liang, Ying-Hoi Lai, Liang-Xi Pang, Yi Liu, Junying Shen, Jianqiang Hou, Qing Lin He, Bochao Xu, Junshu Chen, Gan Wang, Chang Liu, Rolf Lortz, Iam-Keong Sou. 2015-09-09. Large-area epitaxial growth of MoSe2 via an incandescent molybdenum source. https://arxiv.org/abs/1509.02694

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