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arXiv · 1509.08673

The thermal stability and separation characteristic of anti-sticking layers of Pt/Cr films for hot slumping technology

Shuang Ma·Mingwu Wen·Zhanshan Wang
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Abstract

The thermal stability and separation characteristic of anti-sticking layers of Pt/Cr films were studied in this paper. Several types of adhesion layers were investigated: 10.0 nm Pt, 1.5 nm Cr+50.0 nm Pt, 2.5 nm Cr+50.0 nm Pt and 3.5 nm Cr+50.0 nm Pt fabricated using direct current magnetron sputtering. The variation of layer thicknesses, roughness, crystallization and surface topography of Pt/Cr films have been analyzed by grazing incidence X-ray reflectometry, large angle X-ray diffraction and the optical profiler before and after heating. 2.5 nm Cr+50.0 nm Pt films exhibit the best thermal stability and separation characteristic according to the heating and hot slumping experiments. The films were also applied as anti-sticking layers to optimize the maximum temperature of hot slumping technology.

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Shuang Ma, Mingwu Wen, Zhanshan Wang. 2015-09-29. The thermal stability and separation characteristic of anti-sticking layers of Pt/Cr films for hot slumping technology. https://doi.org/10.1088/1674-1137%2F40%2F7%2F079001

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