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arXiv · 1512.05297

High speed control of electro-mechanical transduction Advanced Drive Techniques for Optimized Step-and-Settle Response of MEMS Micromirrors

Matthias Imboden·Jackson Chang·Corey Pollock·Evan Lowell·Mehmet Akbulut·Jessica Morrison·Thomas Stark·Thomas G. Bifano·David J. Bishop
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Abstract

Micro/Nano Electro Mechanical Systems (MEMS/NEMS) provide the engineer with a powerful set of solutions to a wide variety of technical challenges. However, because they are mechanical systems, response times can be a limitation. In some situations, advanced engineered drive techniques can improve response times by as much as a thousand, significantly opening up the application space for MEMS/NEMS solutions.

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Matthias Imboden, Jackson Chang, Corey Pollock, Evan Lowell, Mehmet Akbulut, Jessica Morrison, Thomas Stark, Thomas G. Bifano, David J. Bishop. 2016-05-24. High speed control of electro-mechanical transduction Advanced Drive Techniques for Optimized Step-and-Settle Response of MEMS Micromirrors. https://doi.org/10.1109/mcs.2016.2584338

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