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arXiv · 1610.05368

Monolithic CMOS-compatible zero-index metamaterials

Daryl I. Vulis·Yang Li·Orad Reshef·Philip Camayd-Muñoz·Mei Yin·Shota Kita·Marko Lončar·Eric Mazur
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Abstract

Zero-index materials exhibit exotic optical properties that can be utilized for integrated-optics applications. However, practical implementation requires compatibility with complementary metallic-oxide-semiconductor (CMOS) technologies. We demonstrate a CMOS-compatible zero-index metamaterial consisting of a square array of air holes in a 220-nm-thick silicon-on-insulator (SOI) wafer. This design is achieved through a Dirac-cone dispersion. The metamaterial is entirely composed of silicon and offers compatibility through low-aspect-ratio structures that can be simply fabricated in a standard device layer. This platform enables mass adoption and exploration of zero-index-based photonic devices at low cost and high fidelity.

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Daryl I. Vulis, Yang Li, Orad Reshef, Philip Camayd-Muñoz, Mei Yin, Shota Kita, Marko Lončar, Eric Mazur. 2016-10-17. Monolithic CMOS-compatible zero-index metamaterials. https://doi.org/10.1364/oe.25.012381

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