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arXiv · 1611.05310

Numerical Modeling of MEMS Resonators

Hamid T. Chorsi·Meysam T. Chorsi·Stephen D. Gedney
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Abstract

Microelectromechanical systems (MEMS) resonators serve as frequency selective components in applications ranging from biology to communications. In this paper, the dynamic behavior of an RF MEMS disk resonator is formulated using an analytical method.

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Hamid T. Chorsi, Meysam T. Chorsi, Stephen D. Gedney. 2016-11-12. Numerical Modeling of MEMS Resonators. https://arxiv.org/abs/1611.05310

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