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arXiv · 1702.06194

Programmable Mechanical Resonances in MEMS by Localized Joule Heating of Phase Change Materials

Nicola Manca·Luca Pellegrino·Teruo Kanki·Syouta Yamasaki·Hidekazu Tanaka·Antonio Sergio Siri·Daniele Marré
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Abstract

A programmable micromechanical resonator based on a VO2 thin film is reported. Multiple mechanical eigenfrequency states are programmed using Joule heating as local power source, gradually driving the phase transition of VO2 around its Metal-Insulator transition temperature. Phase coexistence of domains is used to tune the stiffness of the device via local control of internal stresses and mechanical properties. This study opens perspectives for developing mechanically configurable nanostructure arrays.

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Nicola Manca, Luca Pellegrino, Teruo Kanki, Syouta Yamasaki, Hidekazu Tanaka, Antonio Sergio Siri, Daniele Marré. 2017-02-07. Programmable Mechanical Resonances in MEMS by Localized Joule Heating of Phase Change Materials. https://doi.org/10.1002/adma.201302087

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