arXiv subjects

Daniele Marré

Publications and source records attributed to Daniele Marré.

13 recordsLinked to original sources

arXiv2025

Oxide Membranes from Bulk Micro-Machining of SrTiO$_3$ substrates

Suspended micro-structures based on complex oxides relies on surface micro-machining processes such as those based on sacrificial layers. These processes prevent to physically access the microstructures from both sides, as substantial part of the substrate is not removed. In this work, we develop a bulk micromachining protocol of a commonly used substrate employed in oxide thin film deposition. We realize suspended oxide thin film devices by fabricating pass-through holes across SrTiO$_3$(100) or SrTiO$_3$(110) substrates. Careful calibration of anisotropic etching rates allows controlling the final geometry of the aperture in the substrate in a predictable way. As demonstrators of possible device geometries, we present clamped membranes and trampolines of (La,Sr)MnO$_3$, a conductive magnetic oxide, and a suspended trampoline resonator carved from the SrTiO$_3$ substrate itself. Reported protocols can be readily extended to a broad variety of other complex oxides so to extend the application of membranes technology beyond those of commercially-available silicon compounds.

cond-mat.mtrl-sci↗

arXiv2025

Magnetic Trampoline Resonators from (La,Sr)MnO3 Single-Crystal Thin Films

Micro-electro-mechanical resonators employing a magnetic element have been proposed for magnetic field sensing applications, but the integration of magnetic materials with standard semiconductor compounds is challenging and requires complex fabrication protocols. We present a different approach relying on (La0.7,Sr0.3)MnO3 (LSMO), an oxide compound that works both as structural element for the resonator and functional magnetic layer. Suspended trampolines are realized in a single step process from LSMO thin films and show quality factor up to 60k and fQ products reaching 10$^{10}$ Hz. Their magnetic properties are probed by a SQUID magnetometer and magnetic force microscopy, showing saturation magnetization of 240 kA/m at room temperature and in-plane magnetic domains with coercivity of 2.5 mT. Being entirely made from a magnetic material, these resonators exhibit a larger magnetic interaction volume compared to other solutions, making them ideal candidates as building blocks for high-sensitivity magnetic field sensors.

physics.app-ph↗

arXiv2024

Integration of High-Tc Superconductors with High Q Factor Oxide Mechanical Resonators

Micro-mechanical resonators are building blocks of a variety of applications in basic science and applied electronics. This device technology is mainly based on well-established and reproducible silicon-based fabrication processes with outstanding performances in term of mechanical Q factor and sensitivity to external perturbations. Broadening the functionalities of MEMS by the integration of functional materials is a key step for both applied and fundamental science. However, combining functional materials and silicon-based compounds is challenging. An alternative approach is fabricating MEMS based on complex heterostructures made of materials inherently showing a variety of physical properties such as transition metal oxides. Here, we report on the integration of a high-Tc superconductor YBa2Cu3O7 (YBCO) with high Q factor micro-bridge resonator made of a single-crystal LaAlO3 (LAO) thin film. LAO resonators are tensile strained, with a stress of 345 MPa, show Q factor in the range of tens of thousands, and have low roughness. The topmost YBCO layer deposited by Pulse Laser Deposition shows a superconducting transition starting at 90 K with zero resistance below 78 K. This result opens new possibilities towards the development of advanced transducers, such as bolometers or magnetic field detectors, as well as basic science experiments in solid state physics, material science, and quantum opto-mechanics.

physics.app-ph↗

arXiv2023

Strain, Young's modulus, and structural transition of EuTiO3 thin films probed by micro-mechanical methods

EuTiO3 (ETO) is a well-known complex oxide mainly investigated for its magnetic properties and its incipient ferro-electricity. In this work, we demonstrate the realization of suspended micro-mechanical structures, such as cantilevers and micro-bridges, from 100 nm-thick single-crystal epitaxial ETO films deposited on top of SrTiO3(100) substrates. By combining profile analysis and resonance frequency measurements of these devices, we obtain the Young's modulus, strain, and strain gradients of the ETO thin films. Moreover, we investigate the ETO anti-ferro-distorsive transition by temperature-dependent characterizations, which show a non-monotonic and hysteretic mechanical response. Comparison between experimental and literature data allows us to weight the contribution from thermal expansion and softening to the tuning slope, while a full understanding of the origin of such a wide hysteresis is still missing. We also discuss the influence of oxygen vacancies on the reported mechanical properties by comparing stoichiometric and oxygen-deficient samples.

cond-mat.mtrl-sci↗

arXiv2021

The role of etching anisotropy in the fabrication of freestanding oxide microstructures on SrTiO3(100), SrTiO3(110), and SrTiO3(111) substrates

The release process for the fabrication of freestanding oxide microstructures relies on appropriate, controllable and repeatable wet etching procedures. SrTiO3 is among the most employed substrates for oxide thin films growth and can be decomposed in HF:water solution. Such process is strongly anisotropic and is affected by local defects and substrate cut-plane. We analyze the etching behavior of SrTiO3 substrates having (100), (110), and (111) cut-planes during immersion in a 5% HF:water solution. The etching process over the three substrates is compared in terms of pitting, anisotropy, macroscopic etch rate and underetching effects around HF-resistant (La,Sr)MnO3 thin film micropatterns. The release of targeted structures, such as the reported (La,Sr)MnO3 freestanding microbridges, depends on the substrate crystallographic symmetry and on the in-plane orientation of the structures themselves along the planar directions. By comparing the etching evolution at two different length scales, we distinguish two regimes for the propagation of the etching front: an intrinsic one, owning to a specific lattice direction, and a macroscopic one, resulting from the mixing of different etching fronts. We report the morphologies of the etched SrTiO3 surfaces and the geometries of the underetched regions as well as of the microbridge clamping zones. The reported analysis will enable the design of complex MEMS devices by allowing to model the evolution of the etching process required for the release of arbitrary structures made of oxide thin films deposited on top of STO.

cond-mat.mtrl-sci↗

arXiv2017

Selective high frequency mechanical actuation driven by the VO2 electronic instability

Micro- and nano-electromechanical resonators are a fundamental building block of modern technology, used in environmental monitoring, robotics, medical tools as well as fundamental science. These devices rely on dedicated electronics to generate their driving signal, resulting in an increased complexity and size. Here, we present a new paradigm to achieve high-frequency mechanical actuation based on the metal-insulator transition of VO$\mathrm{_2}$, where the steep variation of its electronic properties enables to realize high-frequency electrical oscillations. The dual nature of this phase change, which is both electronic and structural, turns the electrical oscillations into an intrinsic actuation mechanism, powered by a small DC voltage and capable to selectively excite the different mechanical modes of a microstructure. Our results pave the way towards the realization of micro- and nano-electro-mechanical systems with autonomous actuation from integrated DC power sources such as solar cells or micro-batteries.

physics.app-ph↗

arXiv2017

Programmable Mechanical Resonances in MEMS by Localized Joule Heating of Phase Change Materials

A programmable micromechanical resonator based on a VO2 thin film is reported. Multiple mechanical eigenfrequency states are programmed using Joule heating as local power source, gradually driving the phase transition of VO2 around its Metal-Insulator transition temperature. Phase coexistence of domains is used to tune the stiffness of the device via local control of internal stresses and mechanical properties. This study opens perspectives for developing mechanically configurable nanostructure arrays.

cond-mat.mes-hall↗

arXiv2017

Reversible oxygen vacancies doping in (La$_{0.7}$,Sr$_{0.3}$)MnO$_3$ microbridges by combined self-heating and electromigration

Combination of electric fields and Joule self-heating is used to change the oxygen stoichiometry and promote oxygen vacancy drift in a free-standing $\mathrm{(La,Sr)MnO_3}$ thin film microbridge placed in controlled atmosphere. By controlling the local oxygen vacancies concentration, we can reversibly switch our LSMO-based microbridges from metallic to insulating behavior on timescales lower than 1 s and with small applied voltages (<5 V). The strong temperature gradients given by the microbridge geometry strongly confine the motion of oxygen vacancies, limiting the modified region within the free-standing area. Multiple resistive states can be set by selected current pulses that determine different oxygen vacancies profiles within the device . Qualitative analysis of device operation is also provided with the support of Finite Element Analysis.

cond-mat.str-el↗

arXiv2017

Influence of thermal boundary conditions on the current-driven resistive transition in $\mathbf{VO_2}$ microbridges

We investigate the resistive switching behaviour of $\mathrm{VO_2}$ microbridges under current bias as a function of temperature and thermal coupling with the heat bath. Upon increasing the electrical current bias, the formation of the metallic phase can progress smoothly or through sharp jumps. The magnitude and threshold current values of these sharp resistance drops show random behaviour and are dramatically influenced by thermal dissipation conditions. Our results also evidence how the propagation of the metallic phase induced by electrical current in $\mathrm{VO_2}$, and thus the shape of the resulting high-conductivity path, are not predictable. We discuss the origin of the switching events through a simple electro-thermal model based on the domain structure of $\mathrm{VO_2}$ films that can be useful to improve the stability and controllability of future $\mathrm{VO_2}$-based devices.

cond-mat.str-el↗

arXiv2016

Nanopatterning process based on epitaxial masking for the fabrication of electronic and spintronic devices made of La0.67Sr0.33MnO3/LaAlO3/SrTiO3 heterostructures with in situ interfaces

The fabrication of oxide electronics devices is presently hindered by the lack of standardized and well established patterning procedures, applicable down to the nanoscale. In this work, the authors propose a procedure to obtain patterns with resolution around 100 nm on (La,Sr)MnO3/LaAlO3/SrTiO3 heterostructures. Our method is based on a multistep technique, which includes wet and dry etching, epitaxial masking, and e-beam lithography. Our procedure is devised to define independent patterns on the interfacial two dimensional electron gas and on the metallic top electrode, while preserving an all-in situ approach for the heterostructure growth. The authors show results on nano-scale devices based on (La,Sr)MnO3/LaAlO3/SrTiO3, suitable for oxide spintronics applications.

cond-mat.mes-hall↗

arXiv2014

Persistent photoconductivity in 2-dimensional electron gases at different oxide interfaces

We report on the transport characterization in dark and under light irradiation of three different interfaces: LaAlO3/SrTiO3, LaGaO3/SrTiO3, and the novel NdGaO3/SrTiO3 heterostructure. All of them share a perovskite structure, an insulating nature of the single building blocks, a polar/non- polar character and a critical thickness of four unit cells for the onset of conductivity. The interface structure and charge confinement in NdGaO3/SrTiO3 are probed by atomic-scale- resolved electron energy loss spectroscopy showing that, similarly to LaAlO3/SrTiO3, extra electronic charge confined in a sheet of about 1.5 nm in thickness is present at the NdGaO3/SrTiO3 interface. Electric transport measurements performed in dark and under radiation show remarkable similarities and provide evidence that the persistent perturbation induced by light is an intrinsic peculiar property of the three investigated oxide-based polar/non-polar interfaces. Our work sets a framework for understanding the previous contrasting results found in literature about photoconductivity in LaAlO3/SrTiO3 and highlights the connection between the origin of persistent photoconductivity and the origin of conductivity itself. An improved understanding of the photo- induced metastable electron-hole pairs might allow to shed a direct light on the complex physics of this system and on the recently proposed perspectives of oxide interfaces for solar energy conversion.

cond-mat.str-el↗

arXiv2012

Reversible and Persistent Photoconductivity at the NdGaO3/SrTiO3 Conducting Interface

The interface between the band gap insulators LaAlO3 and SrTiO3 is known to host a highly mobile two-dimensional electron gas. Here we report on the fabrication and characterization of the NdGaO3/SrTiO3 interface, that shares with LaAlO3/SrTiO3 an all-perovskite structure, the insulating nature of the single building block and the polar-non polar character. Our work demonstrates that in NdGaO3/SrTiO3 a metallic layer of mobile electrons is formed, with properties comparable to LaAlO3/SrTiO3. The localization of the injected electrons at the Ti sites, within a few unit cells from the interface, was proved by Atomic-scale-resolved EELS analyses. The electric transport and photoconduction of samples were also investigated. We found that irradiation by photons below the SrTiO3 gap does not increase the carrier density, but slightly enhances low temperature mobility. A giant persistent photoconductivity effect was instead observed, even under irradiation by low energy photons, in highly resistive samples fabricated at non-optimal conditions. We discuss the results in the light of different mechanisms proposed for the two-dimensional electron gas formation. Both the ordinary and the persistent photoconductivity in these systems are addressed and analyzed.

cond-mat.mtrl-sci↗

arXiv2010

Conducting interfaces between band insulating oxides: the LaGaO3/SrTiO3

We show that the growth of the heterostructure LaGaO3/SrTiO3 yields the formation of a highly conductive interface. Our samples were carefully analyzed by high resolution electron microscopy, in order to assess their crystal perfection and to evaluate the abruptness of the interface. Their carrier density and sheet resistance are compared to the case of LaAlO3/SrTiO3 and a superconducting transition is found. The results open the route to widening the field of polar-non polar interfaces, pose some phenomenological constrains to their underlying physics and highlight the chance of tailoring their properties for future applications by adopting suitable polar materials.

cond-mat.mtrl-sci↗