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arXiv · 1712.01365

Fabrication of high quality factor lithium niobate double-disk using a femtosecond laser

Zhiwei Fang·Ni Yao·Min Wang·Jintian Lin·Jianhao Zhang·Rongbo Wu·Lingling Qiao·Wei Fang·Tao Lu·Ya Cheng
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Abstract

We demonstrate fabrication of a high quality factor lithium niobate double-disk whispering-gallery microcavity using femtosecond laser assisted ion beam milling. Using this method, two vertically stacked 30-um-diameter disks with a 200-nm-gap are fabricated. With our device, an optical quality factor as high as 1.2*10^5 is demonstrated. Our approach is scalable to fabricate multiple disks on a single chip.

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Zhiwei Fang, Ni Yao, Min Wang, Jintian Lin, Jianhao Zhang, Rongbo Wu, Lingling Qiao, Wei Fang, Tao Lu, Ya Cheng. 2017-10-20. Fabrication of high quality factor lithium niobate double-disk using a femtosecond laser. https://arxiv.org/abs/1712.01365

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