arXiv · 1808.10834
3D-Printed Optics for Wafer-Scale Probing
Abstract
Mass production of photonic integrated circuits requires high-throughput wafer-level testing. We demonstrate that optical probes equipped with 3D-printed elements allow for efficient coupling of light to etched facets of nanophotonic waveguides. The technique is widely applicable to different integration platforms.
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Mareike Trappen, Matthias Blaicher, Philipp-Immanuel Dietrich, Tobias Hoose, Yilin Xu, Muhammad Rodlin Billah, Wolfgang Freude, Christian Koos. 2018-08-31. 3D-Printed Optics for Wafer-Scale Probing. https://arxiv.org/abs/1808.10834
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