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arXiv · 1903.08479

PORT: A piezoelectric optical resonance tuner

Bin Dong·Hao Tian·Michael Zervas·Tobias J. Kippenberg·Sunil A. Bhave
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Abstract

This abstract presents an aluminum nitride (AlN) piezoelectric actuator for tuning optical resonance modes of silicon nitride photonic resonators. The AlN actuator is fabricated on top of a thick silicon dioxide cladding that encapsulates the nitride resonator and waveguide. The PORT is defined by undercutting the cladding layer with a lateral silicon etch. It tunes the optical wavelength by 20pm on applying 60 V to the top electrode with a 0.5nA current draw. The thick oxide cladding preserves the resonator's loaded quality factor Q optical of 64,000 across the entire tuning range. The first bending mode is at 1.1MHz enabling a tuning speed of <1 {\mu}s.

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Bin Dong, Hao Tian, Michael Zervas, Tobias J. Kippenberg, Sunil A. Bhave. 2019-03-20. PORT: A piezoelectric optical resonance tuner. https://doi.org/10.1109/memsys.2018.8346661

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