Squeeze film pressure sensors based on SiN membrane sandwiches

Sepideh Naserbakht; Aurélien Dantan

doi:10.1016/j.sna.2019.111588

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arXiv · 1906.07980

Squeeze film pressure sensors based on SiN membrane sandwiches

Sepideh Naserbakht·Aurélien Dantan

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Abstract

We realize squeeze film pressure sensors using suspended, high mechanical quality silicon nitride membranes forming few-micron gap sandwiches. The effects of air pressure on the mechanical vibrations of the membranes are investigated in the range 10^-3-50 mbar and the intermembrane coupling induced by the gas is discussed in light of a squeeze film coupled-oscillator model. The high responsivity (several kHz/mbar) and the sub-pascal sensitivity of such simple pressure sensors are attractive for absolute and direct pressure measurements in rarefied air or high vacuum environments.

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Sepideh Naserbakht, Aurélien Dantan. 2019-06-19. Squeeze film pressure sensors based on SiN membrane sandwiches. https://doi.org/10.1016/j.sna.2019.111588

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