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arXiv · 1908.01856

Fabrication of a multifunctional photonic integrated chip on lithium niobate on insulator using femtosecond laser assisted chemo-mechanical polish

Rongbo Wu·Jintian Lin·Min Wang·Zhiwei Fang·Wei Chu·Jianhao Zhang·Junxia Zhou·Ya Cheng
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Abstract

We report fabrication of a multifunctional photonic integrated chip on lithium niobate on insulate (LNOI), which is achieved by femtosecond laser assisted chemo-mechanical polish. We demonstrate a high extinction ratio beam splitter, a 1 * 6 optical switch, and a balanced 3 * 3 interferometer on the fabricated chip by reconfiguring the microelectrode array integrated with the multifunctional photonic circuit.

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Rongbo Wu, Jintian Lin, Min Wang, Zhiwei Fang, Wei Chu, Jianhao Zhang, Junxia Zhou, Ya Cheng. 2019-07-08. Fabrication of a multifunctional photonic integrated chip on lithium niobate on insulator using femtosecond laser assisted chemo-mechanical polish. https://doi.org/10.1364/ol.44.004698

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