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arXiv · 2006.11562

High-index-contrast single-mode optical waveguides fabricated on lithium niobate by photolithography assisted chemo-mechanical etching (PLACE)

Jianhao Zhang·Rongbo Wu·Min Wang·Zhiwei Fang·Jintian Lin·Junxia Zhou·Renhong Gao·Zhe Wang·Wei Chu·Ya Cheng
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Abstract

We report fabrication of low loss single mode waveguides on lithium niobate on insulator (LNOI) cladded by a layer of SiO2. Our technique, termed photolithography assisted chemo-mechanical etching (PLACE), relies on patterning of a chromium film into the mask shape by femtosecond laser micromachining and subsequent chemo-mechanical etching of the lithium niobate thin film. The high-index-contrast single mode waveguide is measured to have a propagation loss of 0.13 dB/cm. Furthermore, waveguide tapers are fabricated for boosting the coupling efficiency.

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Jianhao Zhang, Rongbo Wu, Min Wang, Zhiwei Fang, Jintian Lin, Junxia Zhou, Renhong Gao, Zhe Wang, Wei Chu, Ya Cheng. 2020-05-03. High-index-contrast single-mode optical waveguides fabricated on lithium niobate by photolithography assisted chemo-mechanical etching (PLACE). https://doi.org/10.35848/1347-4065%2Faba0d6

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