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arXiv · 2009.06733

Limiting Spectral Resolution of a Reflection Grating Made via Electron-Beam Lithography

Casey T. DeRoo·Jared Termini·Fabien Grise·Randall L. McEntaffer·Benjamin D. Donovan·Chad Eichfeld
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Abstract

Gratings enable dispersive spectroscopy from the X-ray to the optical, and feature prominently in proposed flagships and SmallSats alike. The exacting performance requirements of these future missions necessitate assessing whether the present state-of-the-art in grating manufacture will limit spectrometer performance. In this work, we manufacture a 1.5 mm thick, 1000 nm period at grating using electron-beam lithography (EBL), a promising lithographic technique for patterning gratings for future astronomical observatories. We assess the limiting spectral resolution of this grating by interferometrically measuring the diffracted wavefronts produced in +/-1st order. Our measurements show this grating has a performance of at least R ~ 14,600, and that our assessment is bounded by the error of our interferometric measurement. The impact of EBL stitching error on grating performance is quantifed, and a path to measuring the period error of customized, curved gratings is presented.

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Casey T. DeRoo, Jared Termini, Fabien Grise, Randall L. McEntaffer, Benjamin D. Donovan, Chad Eichfeld. 2020-09-14. Limiting Spectral Resolution of a Reflection Grating Made via Electron-Beam Lithography. https://doi.org/10.3847/1538-4357/abbe15

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