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arXiv · 2012.02752

An enhanced operating regime for high frequency capacitive discharges

Sanket Patil·Sarveshwar Sharma·Sudip Sengupta·Abhijit Sen·Igor Kaganovich
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Abstract

We report the existence of an enhanced operating regime for a high-frequency, low-pressure capacitively coupled plasma (CCP) discharge in the presence of a weak magnetic field applied parallel to the electrodes. Our PIC-MCC simulations show that the plasma density and ion flux values exhibit a sharp peak when the electron cyclotron frequency equals half of the applied RF frequency. The physical mechanism responsible for this behaviour is traced to a synchronization between the oscillatory motion of the electrode sheath edge and the motion of a set of electrons reflected by this sheath. These electrons gain a substantial amount of energy that causes a concomitant higher ionisation leading to a peak in the ion flux. Our theoretical findings should be easy to verify experimentally in present day CCP devices and could provide useful guidelines for enhancing the operational performance of CCP devices in industrial applications.

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Sanket Patil, Sarveshwar Sharma, Sudip Sengupta, Abhijit Sen, Igor Kaganovich. 2020-12-04. An enhanced operating regime for high frequency capacitive discharges. https://arxiv.org/abs/2012.02752

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