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arXiv · 2102.09698

Robotic fabrication of high-quality lamellae for aberration-corrected transmission electron microscopy

Hideyo Tsurusawa·Nobuto Nakanishi·Kayoko Kawano·Yiqiang Chen·Brandon Van Leer·Teruyasu Mizoguchi
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Abstract

Aberration-corrected scanning transmission electron microscopy (STEM) is widely used for atomic-level imaging of materials. To accelerate the discovery of new materials based on atomic-level investigations, the throughput of aberration-corrected STEM experiments becomes more and more important. However, the throughput of the full workflow of aberration-corrected STEM is still quite low. A fundamental problem is that the preparation of high-quality thin STEM samples (lamellae) depends on manual operation. Here, inspired by the recent successes of "robot scientists", we demonstrate robotic fabrication of high-quality lamellae by focused-ion-beam (FIB) with full automation software. First, we show that robotic FIB can prepare lamellae with a high success rate, where the robotic FIB controls rough-milling, lift-out, and final-thinning processes. Then, we optimize the FIB parameters of the final-thinning process for single crystal Si. Aberration-corrected STEM imaging of these Si lamellae shows atomic-level images with 55 pm resolution. We also demonstrate robotic fabrication of high-quality lamellae of SrTiO3 and sapphire. The robotic FIB system will resolve the current bottleneck of the full workflow of aberration-corrected STEM analysis and accelerate materials discovery based on atomic-level imaging.

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Hideyo Tsurusawa, Nobuto Nakanishi, Kayoko Kawano, Yiqiang Chen, Brandon Van Leer, Teruyasu Mizoguchi. 2021-02-19. Robotic fabrication of high-quality lamellae for aberration-corrected transmission electron microscopy. https://arxiv.org/abs/2102.09698

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